Method of fabricating multi layer MEMS and microfluidic devices

ABSTRACT

A method for fabricating multi layer microelectromechanical and microfluidic devices is disclosed. Multi layer microelectromechanical and microfluidic devices are fabricated on a substrate with layers of predetermined weak and strong bond regions where deconstructed layers of devices at or on the weak bond regions. The layers are then peeled and subsequently bonded to produce a multi layer microelectromechanical and microfluidic devices. An arbitrary number of layers can be bonded and stacked to create either microelectromechanical or microfluidic device or a hyrbid type of device. Also disclosed are methods of creating edge interconnects and vias through the substrate to form interconnections between layers and devices thereon.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit under 35 U.S.C. § 119(e) of U.S.Provisional Application No. 60/428,125 filed on Nov. 20, 2002, and U.S.Provisional Application No. 60/439,232 filed on Jan. 10, 2003, which areboth herein incorporated by reference. This application is acontinuation-in-part of and claims the benefit under 35 U.S.C. § 120 ofcopending U.S. patent application Ser. No. 09/950,909 filed on Sep. 12,2001 entitled “Thin Films and Production Methods Thereof” which isherein incorporated by reference.

TECHNICAL FIELD

The invention relates to a fabrication process for multi layermicroelectromechanical devices and microfluidic devices and, moreparticularly, to a process for fabricating a verticalmicroelectromechanical and microfluidic devices on a semiconductorsubstrate.

BACKGROUND ART

The demand for faster and cheaper integrated circuits is ever growing.Moore's Law posits that the number of transistors per square inch woulddouble every year. However, as traditional two dimensional (or planar)chipmaking methods are reaching its boundaries, in order to fulfill theprophecy of Moore's Law, more innovative techniques for expanding thechipmaking frontiers are necessary.

Heretofore, most of the demand for denser integrated circuits has beenmet by ever shrinking active devices fabricated on a relatively planarstructure. That is, two dimensional chipmaking has been the predominantmethod of semiconductor fabrication. Most semiconductor devices havebeen built in a planar monocrystalline semiconductor substrate. Thisapproach allows only very limited vertical integration into the thirddimension.

As the limitations of two dimensional chip making are approaching, majorbreakthroughs in performance will be derived from three dimensionalchipmaking (that is, chipmaking in the z-dimension).

Vertical integration, or stacking of microdevices into the same package,is an attractive way to decrease packaging volume, to increase circuitdensity and to conserve board space, and to increase performance andfunctionality. Reductions of interchip delays and power consumption areboth benefits of stacked integration. If the devices are thinned andstacked on top of each other, the advantages in cost and circuit densityare potentially huge. For both IC and MEMS processes, the thirddimension of the silicon wafer remains largely unexploited.

Current commercial approaches to vertical stacking of 2-dimensionaldevices are generally chip-scale and rely on wafer thinning by grinding.Most methods rely on interconnection by way of throughholes orwire-bonded, stacked mother-daughter chips. Current methods all havelimitations with respect to package size, cost, reliability and yieldimpact. Despite the difficulties, stacking devices to achieve 3-Dintegration is finding applications, particularly in combining MicroElectromechanical Systems (“MEMS”) with Application Specific IntegratedCircuits (“ASIC”) controllers. High density memory packages made bystacking individual chips have found specialty applications.

IBM U.S. Pat. No. 6,355,501 discloses a method of fabricating athree-dimensional IC assembly, generally on chip scale. Disclosedtherein is assembly consisting of three dimensional stacked Silicon onInsulator (“SOI”) chips, and a method of forming such integrated circuitassembly. Each of the SOI chips includes a handler making mechanicalcontact to a first metalization pattern making electrical contact to asemiconductor device. The metalized pattern, in turn, contacts a secondmetalization pattern positioned on an opposite surface of thesemiconductor device. The disclosed method includes the steps of: a)providing a substrate having a third metalized pattern on a firstsurface of the substrate; b) aligning one of the SOI chips on the firstsurface of the substrate, by having the second metalization pattern ofthe SOI chip make electrical contact with the third metalized pattern ofthe substrate; c) removing the handler from the SOI chip, exposing thefirst metalization pattern of the SOI chip; d) aligning a second one ofthe SOI chips with the first SOI chip, having the second metalizationpattern of the second SOI chip make electrical contact to the exposedfirst metalization pattern of the first SOI chip; and e) repeating stepsc) and d) for mounting subsequent SOI chips one on top of the other.However, this reference teaches a method that may be prohibitivelyexpensive and severally functionally limited.

A key disadvantage of the method taught in the aforementioned U.S. Pat.No. 6,335,501 is that the applicants thereof note that formingthree-dimension circuits on a wafer scale leads to low yield. Further,alignment of each chip is considered to be a significant problempreventing wafer scale stacking. Each chip stacking step includesalignment of the layers to be bonded to each other. Transparentadhesives and windows must be provided to allow optical access to thealignment marks on both surfaces to be bonded to each other. Further,the handler must be transparent to the alignment marks. Otherdisadvantages relate to the number of sequential repeated process steps.As described therein, to make electrical contract between stackedlayers, a solder reflow step is performed between each layer when it isstacked and aligned. After reflow, the chip stack is edge bonded.Further, the handler must be removed by glue removal (by laser or otherheating), polishing, and other preparation steps before the subsequentlayer may be bonded. Finally, excess substrate is grinded or otherwiseetched-back for removal.

These drawbacks lead to several disadvantages related to cost andfunctionality. Cost detriments are found with the grinding removal;numerous sequential steps; chip scale as opposed to wafer scalestacking, wherein wafer scale is known to reduce cost; inability toovercome yield issues on wafer scale thus reverting to chip scale;limitation of the number of layers, thus to form higher number stacks,stacks must be stacked on other stacks; overall yield is decreasedbecause the number of sequential statistically dependant throughinterconnects; multiple reflow steps potentially damage other layers;.Functionality drawbacks include lack of diagnostics; lack ofinterconnect versatility; limited space for interconnects; limitedaddressability of large stack, particularly memory stack; no ability tointegrate noise shielding; no ability to integrate heat dissipation; noability of ground plane; limitation of the number of layers.

One implementation of 3-dimensional packaging has been undertaken byIrvine Sensors, Irvine, Calif., and IBM. Discrete die have been stackedand interconnected utilizing an edge lift-off process. Known-good-die(KGD) are thinned. Solder bumps at the die edge are used to align andinterconnect the stacked die. The die are potted in an epoxy matrix. Theepoxy helps to align different sized die, and is used as theinterconnect surface. The individual stacking and interconnection ofdie, along with the requirement for KGD causes this to be a veryexpensive manufacturing method.

Another implementation of 3-dimensional packaging has been undertaken byCubic Memory, who manufactures high-density, stacked memory modules byapplying gold interconnect traces that are deposited over insulatinglayers of polyimide on whole wafers. However, stacking and verticalinterconnect is still on an individual chip-scale.

A further implementation of 3-dimensional packaging has been undertakenby Tessera, San Jose, Calif., in conjunction with Intel, to developchip-scale, stacked package by attaching the chips onto flexiblesubstrates via micro-ball grid array bonding, then z-folding thechip-loaded tape onto itself.

Ziptronix is apparently developing wafer-scale stacking of ICs.Considerable challenges with alignment, stress management, thermalmanagement, high density interconnect and yield are still beingaddressed.

As illustrated above, there are various deficiencies with availablevertical integration. One primary deficiency is due to yield loss. Allapproaches to device stacking that are currently in the marketplace aredie-scale. Individual die are prepared, aligned, stacked and connected.The processing is expensive and the yield loss for the stack is thecompounded yield loss for each device in the layer. The increased yieldloss is sometimes tolerated for inexpensive devices such as SRAM stacks.But when more expensive devices are being stacked, the solution is touse known good die (KGD). For KGD, each unpackaged die undergoes bum-inand test. Furthermore, the stack requires electrical test after thecompletion of each layer. The process is very expensive and theapplications have been limited to high end users, such as military andsatellite technology.

Another deficiency of conventional vertical integration is due to thefact that the technology is limited to a die-scale. With the exceptionof the yet-to-reach-the market approach of Ziptronix, all of theapproaches to stacking devices are on die scale. The significanteconomic advantage of wafer-scale manufacturing is completelyunavailable to these technologies. The high cost of handling and testingindividual die restricts these methods to high-end applications.

Another problem known throughout conventional manufacturing processesforming circuits is the requirement to support the processing device ona substrate. During processing, the substrate is required to providemechanical support and thermal stability. The processed substrate,therefore, must be sufficiently thick to withstand the harsh processingenvironment, including high pressures and temperatures, as well aschemical and energy exposure. Further processing is therefore requiredif viable thin film devices are sought.

One processing approach, undertaken after a circuit or other structureis formed on a sufficiently thick substrate to withstand processing, isto remove the thickness of the substrate by mechanical methods. Thesemechanical methods, such as cutting or grinding, waste a tremendousamount of material and labor. The cut or ground material often may notbe recycled, or, even if it is recyclable, the material must undergofurther processing before reuse. Further, the thinned substrate isgenerally subjected to polishing or other processes to smooth thesurface. Other techniques include formation of an etch stop layer on thesubstrate prior to device fabrication. However, the substrate is stilltypically ground or otherwise mechanically removed prior to a selectiveetching step, which etches the substrate generally to the etch stoplayer. All of these techniques result in wasted time and material, aswell presenting quality control concerns.

Another technique to form thin film devices utilizes ion implantationmethods. A common use of ion implantation is to generally derive thinlayers of semiconductor materials. Such methods are disclosed in, forexample, EP01045448 and WO00/024059, both entitled “Method of ProducingSOI Wafer by Hydrogen Ion Implanting Separation Method and SOI WaferProduced by the Method,” and both incorporated by reference herein.Particularly, ions, such as hydrogen ions or helium ions, are implantedwithin the top surface of an oxidized silicon wafer. The ions areimplanted to a depth within the top surface. Thereafter, a thin layermay be delaminated from the bulk silicon substrate, which is generallysubjected to high temperature (greater than about 500° C.) processes.This thin layer may be then supported on an insulator layer and asubstrate, and microelectronics or other structures may be formedthereon. The microelectronics, however, must be formed subsequent todelaminating the thin layer, since ion implantation detrimentallyaffects the microelectronics. Particularly, the thin layer may bewarped, the devices may be damaged by the ion implantation, or thedevice may be damaged during delamination.

Bruel et al. WO 98/33209, entitled “Method For Obtaining A Thin Film, InParticular Semiconductor, Comprising A Protected Ion Zone And InvolvingAn Ion Implantation,” discloses an approach to providing a thin filmincluding a metal oxide semiconductor (“MOS”). In general, a MOStransistor is formed on the surface of a semiconductor substrate. Theregion of the transistor is masked, and surrounding regions are ionimplanted to define an intended line of fracture (i.e., wheremicrobubbles develop from the ion implantation step). To separate thethin film having the transistor thereon, cleavage is commencing at theintended line of fracture in the vicinity of the microbubbles, and ispropagated through the crystal plane under the transistor (i.e., whereno microbubbles exist). While it may be possible to realize thin filmshaving transistors thereon using the teachings of WO 98/33209, thetransistors are subjected to undesirable stress in the cleavagepropagation, since the crystalline structure of the substrate materialmust be fractured in the immediate vicinity of the transistor.

Aspar et al. U.S. Pat. No. 6,103,597 entitled “Method Of Obtaining AThin Film Of Semiconductor Material,” generally teaches subjecting athin film substrate having microelectronics or other structures thereinto ion bombardment. Gaseous microbubbles are thus formed at a depththerein defining the thickness of the thin film. However, many types ofmicroelectronics and structures that may be formed on the substraterequire a subsequent annealing step, in order to repair damage or otherdefects imparted to the elements. Thereafter, the thin film layer istaught to be separable from the underlying substrate material by thermaltreatment that causes a fracture along the line of the microbubbles.

Sakaguchi et al., U.S. Pat. Nos. 6,221,738 entitled “Substrate AndProduction Method Thereof” and U.S. Pat. No. 6,100,166 entitled “ProcessFor Producing Semiconductor Article”, both of which are incorporated byreference herein, teach bonding a substrate to a porous semiconductorlayer. The bonding at the porous layer is taught to be mechanicallyweaker, thus facilitating removal by application of an external force.U.S. Pat. No. 6,100,166 teaches that a layer may be removed with a forcein a peeling direction. However, both of these references disclose useof the weak porous separation mechanism at the entire interface betweenthe layers. This may compromise overall mechanical integrity of theintermediate structure and any semiconductor devices formed on theporous semiconductor material.

Henley et al., U.S. Pat. No. 6,184,111 entitled “Pre-SemiconductorProcess Implant And Post-Process Film Separation,” which is incorporatedby reference herein, discloses use of a stressed layer at a selecteddepth below a silicon water surface. Devices are formed above thestressed layer. Implantation is generally carried out at the same energylevel with varying dosage across the diameter of the wafer. Controlledcleavage propagation is initiated to separate a layer above the stressedlayer, including any devices thereon. It is noted that processing toform the stressed layer may damage devices formed thereon, thussubsequent repair annealing is typically required. Therefore,conventional ion implantation and delamination methods are lacking inthat a thin film including microelectronics or other structures thereonmay not be ion implanted without warping or other damage to the thinsemiconductor.

Therefore, considering the deficiencies of present circuit processing,it would be desirable to provide a three-dimensional integrated circuit,on a chip or on a wafer scale, which avoids the drawbacks andshortcomings of the conventional approaches.

Accordingly, a primary object of the present invention is to provide alow cost three-dimensional integrated circuit.

A further object of the invention is to provide a multiple layeredsubstrate for fabrication of a useful device.

An additional object of the invention is to provide a multiple layeredsubstrate for fabrication of a useful device including a buried oxidelayer therein.

Another object of the present invention is to provide improved alignmenttechniques, particularly for use with the device layer formation,removal and stacking methods herein.

It is another object of the invention is to provide improved edgeinterconnections.

Additionally, an object of the invention is to provide improved throughinterconnections.

An additional object of the invention is to provide a verticallyintegrated device that is capable of including shielding between layers.

An additional object of the invention is to provide a verticallyintegrated device that is capable of including heat dissipation betweenlayers.

An additional object of the invention is to provide a verticallyintegrated device that is capable of very high numbers ofinterconnections, by virtue of a buffer or congestion layer.

The above and other objects and advantages of this invention will becomemore readily apparent when the following description is read inconjunction with the accompanying drawings.

SUMMARY OF THE INVENTION

The above-discussed and other problems and deficiencies of the prior artare overcome or alleviated, and the objects of the invention areattained, by the several methods and apparatus of the present invention.

In one aspect, the invention is a method of fabricating a verticalmicroelectromechanical device, the method comprising the steps of:providing a bulk substrate; selectively creating strong bond regions andweak bond regions on said substrate; providing a first bondedsemiconductor layer vertically supported on said substrate; creating anelectrode on said first bonded semiconductor layer, said electrodescorresponding to said weak bond regions; creating an actuatable elementdisposed opposite said electrode; removing said first semiconductorlayer from said bulk substrate; and bonding said first semiconductorlayer to a second semiconductor layer.

In another aspect, the invention is a vertical MEMs device comprising: abulk substrate on a wafer; a first selectively bonded semiconductorlayer vertically supported on said substrate, said bonded semiconductorlayer containing weak bond regions and strong bond regions; a secondselectively bonded semiconductor layer vertically supported on saidfirst selectively bonded semiconductor layer; wherein an electrode andan actuatable element are created at or on said weak bond regions;wherein said electrode and said actuatable element are disposed oppositeeach other, and wherein said electrode and said actuatable elementvertically spans said first selectively bonded semiconductor layer andsaid second selectively bonded semiconductor layer.

In another aspect, the invention is a vertical MEMs device formed on adie comprising: a bulk substrate on a wafer; a first selectively bondedsemiconductor layer vertically supported on said substrate, said bondedsemiconductor layer containing weak bond regions and strong bondregions; a second selectively bonded semiconductor layer verticallysupported on said first selectively bonded semiconductor layer; whereinan element and an actuatable element are created at or on said weak bondregions; wherein said element and said actuatable element verticallyspans said first selectively bonded semiconductor layer and said secondselectively bonded semiconductor layer, and wherein said die is formedby dicing said bonded semiconductor layers.

In another aspect, the invention is a method of fabricating a multilayer microfluidic device, the method comprising the steps of: providinga bulk substrate; selectively creating strong bond regions and weak bondregions on said substrate; providing a first bonded layer verticallysupported on said substrate; creating a port on said first bonded layer,said port corresponding to said weak bond regions; creating a channelmechanically coupled to said port; removing said first layer from saidbulk substrate; and bonding said first layer to a second layer.

In another aspect, the invention is a multilayer microfluidic devicecomprising: a bulk substrate on a wafer; a first selectively bondedlayer vertically supported on said substrate, said bonded layercontaining weak bond regions and strong bond regions; a secondselectively bonded layer vertically supported on said first selectivelybonded layer; wherein deconstructed ports and deconstructed channels arecreated at or on said weak bond regions, and wherein said ports andchannels vertically span said first selectively bonded layer and saidsecond selectively bonded layer.

In another aspect, the invention is a multilayer microfluidic deviceformed on a die comprising: a bulk substrate on a wafer; a firstselectively bonded layer vertically supported on said substrate, saidbonded layer containing weak bond regions and strong bond regions; asecond selectively bonded layer vertically supported on said firstselectively bonded layer; wherein deconstructed ports and deconstructedchannels are created at or on said weak bond regions; wherein said portsand channels vertically span said first selectively bonded layer andsaid second selectively bonded layer, and wherein said die is formed bydicing said bonded semiconductor layers.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing summary as well as the following detailed description ofpreferred embodiments of the invention, will be better understood whenread in conjunction with the appended drawings. For the purpose ofillustrating the invention, there is shown in the drawings embodimentswhich are presently preferred. It should be understood, however, thatthe invention is not limited to the precise arrangements andinstrumentalities shown. In the drawings, wherein:

FIG. 1 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 2 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 3 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 4 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 5 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 6 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 7 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 8 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 9 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 10 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 11 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 12 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 13 is a schematic cross-section diagram of a selectively bondedmulti layer substrate in accordance with the principles of theinvention;

FIG. 14 is a horizontal cross-section diagram of the geometry of thebond regions of a wafer in accordance with the principles of theinvention;

FIG. 15 is a horizontal cross-section diagram of the geometry of thebond regions of a wafer in accordance with the principles of theinvention;

FIG. 16 is a horizontal cross-section diagram of the geometry of thebond regions of a wafer in accordance with the principles of theinvention;

FIG. 17 is a horizontal cross-section diagram of the geometry of thebond regions of a wafer in accordance with the principles of theinvention;

FIG. 18 is a horizontal cross-section diagram of the geometry of thebond regions of a wafer in accordance with the principles of theinvention;

FIG. 19 is a horizontal cross-section diagram of the geometry of thebond regions of a wafer in accordance with the principles of theinvention;

FIG. 20 is a horizontal cross-section diagram of the geometry of thebond regions of a wafer in accordance with the principles of theinvention;

FIG. 21 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 22 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 23 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 24 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 25 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 26 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 27 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 28 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 29 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 30 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 31 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 32 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 33 is a schematic cross-section diagram of debonding techniques fora wafer in accordance with the principles of the invention;

FIG. 34 is a schematic cross-section of a circuit portion in accordancewith the principles of the invention;

FIG. 35 is a schematic cross-section of a substrate and handler inaccordance with the principles of the invention;

FIG. 36 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 37 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 38 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 39 is a schematic cross-section diagram of circuit portions inaccordance with the principles of the invention;

FIG. 40 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 41 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;.

FIG. 42 is a schematic cross-section diagram of circuit portions inaccordance with the principles of the invention;

FIG. 43 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 44 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 45 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 46 is a schematic cross-section diagram of circuit portions inaccordance with the principles of the invention;

FIG. 47 is a schematic cross-section diagram of circuit portions inaccordance with the principles of the invention;

FIG. 48 is a schematic cross-section diagram of circuit portions inaccordance with the principles of the invention;

FIG. 49 is a schematic cross-section diagram of circuit portions inaccordance with the principles of the invention;

FIG. 50 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 51 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 52 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 53 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 54 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 55 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 56 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 57 is a schematic cross-section diagram of circuit portions andconductors aligned and stacked in accordance with the principles of theinvention;

FIG. 58 is a schematic cross-section diagram of circuit portions alignedand stacked in accordance with the principles of the invention;

FIG. 59 is a schematic cross-section diagram of circuit portions alignedand stacked in accordance with the principles of the invention;

FIG. 60 is a schematic cross-section diagram of edge interconnectionsand circuit portions in accordance with the principles of the invention;

FIG. 61 is a schematic cross-section of edge interconnections inaccordance with the principles of the invention;

FIG. 62 is a schematic cross-section of edge interconnections inaccordance with the principles of the invention;

FIG. 63 is a schematic cross-section diagram of circuit portions alignedand stacked in accordance with the principles of the invention;

FIG. 64 is a schematic cross-section diagram of circuit portions alignedand stacked in accordance with the principles of the invention;

FIG. 65 is a schematic cross-section diagram of shielding layersprovided between adjacent layers in accordance with the principles ofthe invention;

FIG. 66 is a schematic cross-section diagram of channels providedbetween layers in accordance with the principles of the invention;

FIG. 67 is a schematic cross-section diagram of heat-conductive channelsbetween layers in accordance with the principles of the invention;

FIG. 68 is a schematic cross-section diagram of the underside of thedevice layer in accordance with the principles of the invention;

FIG. 69 is a schematic cross-section diagram showing circuit formingregions in accordance with the principles of the invention;

FIG. 70 is a schematic side-view of selectively bonded circuit portionsin accordance with the principles of the invention;

FIG. 71 is a schematic cross-section diagram illustrating the debondingtechnique in accordance with the principles of the invention;

FIG. 72 is a schematic diagram illustrating the alignment of layers inaccordance with the principles of the invention;

FIG. 73 is a schematic diagram illustrating the alignment of layers inaccordance with the principles of the invention;

FIG. 74 is a schematic diagram illustrating the alignment of layers inaccordance with the principles of the invention;

FIG. 75 is a schematic diagram illustrating the alignment of layers inaccordance with the principles of the invention;

FIG. 76 is a schematic diagram illustrating the alignment of layers inaccordance with the principles of the invention;

FIG. 77 is a schematic diagram illustrating the alignment of layers inaccordance with the principles of the invention;

FIG. 78 is a schematic diagram illustrating the alignment of layers inaccordance with the principles of the invention;

FIG. 79 is a schematic diagram illustrating the alignment of layers inaccordance with the principles of the invention;

FIG. 80 is an isometric schematic of a stack of layers in accordancewith the principles of the invention;

FIG. 81 is a schematic isometric illustration of the metalization inaccordance with the principles of the invention;

FIG. 82 is a schematic isometric illustration of the metalization in theprior art;

FIG. 83 is a schematic illustration of the metalization in accordancewith the principles of the invention;

FIG. 84 is a schematic illustration of the metalization in accordancewith the principles of the invention;

FIG. 85 is a schematic illustration of the debonding technique inaccordance with the principles of the invention;

FIG. 86 is a schematic illustration of the alignment technique inaccordance with the principles of the invention;

FIG. 87 is a schematic illustration of the alignment technique inaccordance with the principles of the invention;

FIG. 88 is a schematic illustration of a plug fill method in accordancewith the principles of the invention;

FIG. 89 is a schematic illustration of through interconnects inaccordance with the principles of the invention;

FIG. 90 is a schematic illustration of mechanical alignment inaccordance with the principles of the invention;

FIG. 91 is a schematic illustration of mechanical alignment inaccordance with the principles of the invention;

FIG. 92 is a schematic illustration of sorting layers in accordance withthe principles of the invention;

FIG. 93 is a schematic illustration of sorting layers in accordance withthe principles of the invention;

FIG. 94 is a schematic illustration of sorting layers in accordance withthe principles of the invention;

FIG. 95 is a schematic illustration of sorting layers in accordance withthe principles of the invention;

FIG. 96 is a schematic illustration of a handler in accordance with theprinciples of the invention;

FIG. 97 is a schematic illustration of a handler in accordance with theprinciples of the invention;

FIG. 98 is a schematic illustration of a selectively bonded device inaccordance with the principles of the invention;

FIG. 99 is a schematic illustration of processing steps for a MEMSdevice in accordance with the principles of the invention; and

FIG. 100 is a schematic illustration of processing steps for a MEMSdevice in accordance with he principles of the invention.

DETAILED DESCRIPTION OF THE DRAWINGS

The present invention is related to forming three-dimensional integratedcircuits. Prior to discussion of specific formation of thesethree-dimensional integrated circuits, a discussion of the startingsubstrates is presented, as set forth in Applicant's copending U.S.patent application Ser. No. 09/950,909 filed on Sep. 12, 2001 entitled“Thin films and Production Methods Thereof.” This substrate, referred toas a selectively bonded multiple layer substrate, allows for processingof multiple chips on a wafer as is known, but allows the chip layer ofthe wafer to be readily removed, preferably without mechanical grindingor other etch-back techniques. This chip layer then may be stacked onanother chip layer, as described hereinafter, or alternatively, the chiplayer may be diced into individual chips and stacked.

Referring to FIG. 1, a selectively bonded multiple layer substrate 100is shown. The multiple layer substrate 100 includes a layer 1 having anexposed surface 1 B, and a surface 1A selectively bonded to a surface 2Aof a layer 2. Layer 2 further includes an opposing surface 2B. Ingeneral, to form the selectively bonded multiple layer substrate 100,layer 1, layer 2, or both layers 1 and 2 are treated to define regionsof weak bonding 5 and strong bonding 6, and subsequently bonded, whereinthe regions of weak bonding 5 are in a condition to allow processing ofa useful device or structure.

Generally, layers 1 and 2 are compatible. That is, the layers 1 and 2constitute compatible thermal, mechanical, and/or crystallineproperties. In certain preferred embodiments, layers 1 and 2 are thesame materials. Of course, different materials may be employed, butpreferably selected for compatibility.

One or more regions of layer 1 are defined to serve as the substrateregion within or upon which one or more structures, such asmicroelectronics may be formed. These regions may be of any desiredpattern, as described further herein. The selected regions of layer 1may then be treated to minimize bonding, forming the weak bond regions5. Alternatively, corresponding regions of layer 2 may be treated (inconjunction with treatment of layer 1, or instead of treatment to layer1) to minimize bonding. Further alternatives include treating layer 1and/or layer 2 in regions other than those selected to form thestructures, so as to enhance the bond strength at the strong bondregions 6.

After treatment of layer 1 and/or layer 2, the layers may be aligned andbonded. The bonding may be by any suitable method, as described furtherherein. Additionally, the alignment of the layers may be mechanical,optical, or a combination thereof. It should be understood that thealignment at this stage may not, be critical, insomuch as there aregenerally no structures formed on layer 1. However, if both layers 1 and2 are treated, alignment may be required to minimize variation from theselected substrate regions.

The multiple layer substrate 100 may be provided to a user forprocessing of any desired structure in or upon layer 1. Accordingly, themultiple layer substrate 100 is formed such that the user may processany structure or device using conventional fabrication techniques, orother techniques that become known as the various related technologiesdevelop. Certain fabrication techniques subject the substrate to extremeconditions, such as high temperatures, pressures, harsh chemicals, or acombination thereof. Thus, the multiple layer substrate 100 ispreferably formed so as to withstand these conditions.

Useful structures or devices may be formed in or upon regions 3, whichpartially or substantially overlap weak bond regions 5. Accordingly,regions 4, which partially or substantially overlap strong bond regions6, generally do not have structures therein or thereon. After a user hasformed useful devices within or upon layer 1 of the multiple layersubstrate 100, layer 1 may subsequently be debonded. The debonding maybe by any known technique, such as peeling, without the need to directlysubject the useful devices to detrimental delamination techniques. Sinceuseful devices are not generally formed in or on regions 4, theseregions may be subjected to debonding processing, such as ionimplantation, without detriment to the structures formed in or onregions 3.

To form weak bond regions 5, surfaces 1A, 2A, or both may be treated atthe locale of weak bond regions 5 to form substantially no bonding orweak bonding. Alternatively, the weak bond regions 5 may be leftuntreated, whereby the strong bond region 6 is treated to induce strongbonding. Region 4 partially or substantially overlaps strong bond region6. To form strong bond region 4, surfaces 1A, 2A, or both may be treatedat the locale of strong bond region 6. Alternatively, the strong bondregion 6 may be left untreated, whereby the weak bond region 5 istreated to induce weak bonding. Further, both regions 5 and 6 may betreated by different treatment techniques, wherein the treatments maydiffer qualitatively or quantitatively. After treatment of one or bothof the groups of weak bond regions 5 and strong bond regions 6, layers 1and 2 are bonded together to form a substantially integral multiplelayer substrate 100. Thus, as formed, multiple layer substrate 100 maybe subjected to harsh environments by an end user, e.g., to formstructures or devices therein or thereon, particularly in or on regions3 of layer 1.

For purposes of this specification, the phrase “weak bonding” or “weakbond” generally refers to a bond between layers or portions of layersthat may be readily overcome, for example by debonding techniques suchas peeling, other mechanical separation, heat, light, pressure, orcombinations comprising at least one of the foregoing debondingtechniques. These debonding techniques minimally defect or detriment thelayers 1 and 2, particularly in the vicinity of weak bond regions 5.

The treatment of one or both of the groups of weak bond regions 5 andstrong bond regions 6 may be effectuated by a variety of methods. Theimportant aspect of the treatment is that weak bond regions 5 are morereadily debonded (in a subsequent debonding step as described furtherherein) than the strong bond regions 6. This minimizes or preventsdamage to the regions 3, which may include useful structures thereon,during debonding. Further, the inclusion of strong bond regions 6enhances mechanical integrity of the multiple layer substrate 100especially during structure processing. Accordingly, subsequentprocessing of the layer 1, when removed with useful structures thereinor thereon, is minimized or eliminated.

The ratio of the bond strengths of the strong bond regions to the weakbond regions (SB/WB) in general is greater than 1. Depending on theparticular configuration of the strong bond regions and the weak bondregions, and the relative area sizes of the strong bond regions and theweak bond regions, the value of SB/WB may approach infinity. That is, ifthe strong bond areas are sufficient in size and strength to maintainmechanical and thermal stability during processing, the bond strength ofthe weak bond areas may approach zero. However, the ratio SB/WB may varyconsiderably, since strong bonds strengths (in typical silicon andsilicon derivative, e.g., SiO₂, wafers) may vary from about 500millijoules per squared meter (mj/m²) to over 5000 mj/m² as is taught inthe art (see, e.g., Q. Y. Tong, U. Goesle, Semiconductor Wafer Bonding,Science and Technology, pp. 104–118, John Wiley and Sons, New York, N.Y.1999, which is incorporated herein by reference). However, the weak bondstrengths may vary even more considerably, depending on the materials,the intended useful structure (if known), the bonding and debondingtechniques selected, the area of strong bonding compared to the area ofweak bonding, the strong bond and weak bond configuration or pattern onthe wafer, and the like. For example, where ion implantation is used asa step to debond the layers, a useful weak bond area bond strength maybe comparable to the bond strength of the strong bond areas after ionimplantation and/or related evolution of microbubbles at the implantedregions. Accordingly, the ratio of bond strengths SB/WB is generallygreater than 1, and preferably greater than 2, 5, 10, or higher,depending on the selected debonding techniques and possibly the choiceof the useful structures or devices to be formed in the weak bondregions.

The particular type of treatment of one or both of the groups of weakbond regions 5 and strong bond regions 6 undertaken generally depends onthe materials selected. Further, the selection of the bonding techniqueof layers 1 and 2 may depend, at least in part, on the selectedtreatment methodology. Additionally, subsequent debonding may depend onfactors such as the treatment technique, the bonding method, thematerials, the type or existence of useful structures, or a combinationcomprising at least one of the foregoing factors. In certainembodiments, the selected combination of treatment, bonding, andsubsequent debonding (i.e., which may be undertaken by an end user thatforms useful structures in regions 3 or alternatively, as anintermediate component in a higher level device) obviates the need forcleavage propagation to debond layer 1 from layer 2 or mechanicalthinning to remove layer 2, and preferably obviates both cleavagepropagation and mechanical thinning. Accordingly, the underlyingsubstrate may be reused with minimal or no processing, since cleavagepropagation or mechanical thinning damages layer 2 according toconventional teachings, rendering it essentially useless without furthersubstantial processing.

Referring to FIGS. 2 and 3, wherein similarly situated regions arereferenced with like reference numerals, one treatment techniqueincludes use of a slurry containing a solid component and a decomposablecomponent on surface 1A, 2A, or both 1A and 2A. The solid component maybe, for example, alumina, silicon oxide (SiO(x)), other solid metal ormetal oxides, or other material that minimizes bonding of the layers 1and 2. The decomposable component may be, for example, polyvinyl alcohol(PVA), or another suitable decomposable polymer. Generally, a slurry 8is applied in weak bond region 5 at the surface 1A (FIG. 2), 2A (FIG.3), or both 1A and 2A. Subsequently, layers 1 and/or 2 may be heated,preferably in an inert environment, to decompose the polymer.Accordingly, porous structures (comprised of the solid component of theslurry) remain at the weak bond regions 5, and upon bonding, layers 1and 2 do not bond at the weak bond regions 5.

Referring to FIGS. 4 and 5, another treatment technique may rely onvariation in surface roughness between the weak bond regions 5 andstrong bond regions 6. The surface roughness may be modified at surface1A (FIG. 4), surface 2A (FIG. 5), or both surfaces 1A and 2A. Ingeneral, the weak bond regions 5 have higher surface roughness 7 (FIGS.4 and 5) than the strong bond regions 6. In semiconductor materials, forexample the weak bond regions 5 may have a surface roughness greaterthan about 0.5 nanometer (nm), and the strong bond regions 4 may have alower surface roughness, generally less than about 0.5 nm. In anotherexample, the weak bond regions 5 may have a surface roughness greaterthan about 1 nm, and the strong bond regions 4 may have a lower surfaceroughness, generally less than about 1 nm. In a further example, theweak bond regions 5 may have a surface roughness greater than about 5nm, and the strong bond regions 4 may have a lower surface roughness,generally less than about 5 nm. Surface roughness can be modified byetching (e.g., in KOH or HF solutions) or deposition processes (e.g.,low pressure chemical vapor deposition (“LPCVD”) or plasma enhancedchemical vapor deposition (“PECVD”)). The bonding strength associatedwith surface roughness is more fully described in, for example, Gui etal., “Selective Wafer Bonding by Surface Roughness Control”, Journal ofThe Electrochemical Society, 148 (4) G225–G228 (2001), which isincorporated by reference herein.

In a similar manner (wherein similarly situated regions are referencedwith similar reference numbers as in FIGS. 4 and 5), a porous region 7may be formed at the weak bond regions 5, and the strong bond regions 6may remain untreated. Thus, layer 1 minimally bonds to layer 2 at localeof the weak bond regions 5 due to the porous nature thereof. Theporosity may be modified at surface 1A (FIG. 4), surface 2A (FIG. 5), orboth surfaces 1A and 2A. In general, the weak bond regions 5 have higherporosities at the porous regions 7 (FIGS. 4 and 5) than the strong bondregions 6.

Another treatment technique may rely on selective etching of the weakbond regions 5 (at surfaces 1A (FIG. 4), 2A (FIG. 5), or both 1A and2A), followed by deposition of a photoresist or other carbon containingmaterial (e.g., including a polymeric based decomposable material) inthe etched regions. Upon bonding of layers 1 and 2, which is preferablyat a temperature sufficient to decompose the carrier material, the weakbond regions 5 include a porous carbon material therein, thus the bondbetween layers 1 and 2 at the weak bond regions 5 is very weak ascompared to the bond between layers 1 and 2 at the strong bond region 6.One skilled in the art will recognize that depending on thecircumstances, a decomposing material will be selected that will notout-gas, foul, or otherwise contaminate the substrate layers 1 or 2, orany useful structure to be formed in or upon regions 3.

A further treatment technique may employ irradiation to attain strongbond regions 6 and/or weak bond regions 5. In this technique, layers 1and/or 2 are irradiated with neutrons, ions, particle beams, or acombination thereof to achieve strong and/or weak bonding, as needed.For example, particles such as He⁺, H⁺, or other suitable ions orparticles, electromagnetic energy, or laser beams may be irradiated atthe strong bond regions 6 (at surfaces 1A (FIG. 10), 2A (FIG. 11), orboth 1A and 2A). It should be understood that this method of irradiationdiffers from ion implantation for the purpose of delaminating a layer,generally in that the doses and/or implantation energies are much less(e.g., on the order of 1/100^(th) to 1/1000^(th) of the dosage used fordelaminating).

Referring to FIGS. 8 and 9, a still further treatment technique involvesetching the surface of the weak bond regions 5. During this etchingstep, pillars 9 are defined in the weak bond regions 5 on surfaces 1A(FIG. 8), 2A (FIG. 9), or both 1A and 2A. The pillars may be defined byselective etching, leaving the pillars behind. The shape of the pillarsmay be triangular, pyramid shaped, rectangular, hemispherical, or othersuitable shape. Alternatively, the pillars may be grown or deposited inthe etched region. Since there are less bonding sites for the materialto bond, the overall bond strength at the weak bond region 5 is muchweaker then the bonding at the strong bond regions 6.

Yet another treatment technique involves inclusion of a void area 10(FIGS. 12 and 13), e.g., formed by etching, machining, or both(depending on the materials used) at the weak bond regions 5 in layer 1(FIG. 12), 2 (FIG. 13). Accordingly, when the first layer 1 is bonded tothe second layer 2, the void areas 10 will minimize the bonding, ascompared to the strong bond regions 6, which will facilitate subsequentdebonding.

Referring again to FIGS. 2 and 3, another treatment technique involvesuse of one or more metal regions 8 at the weak bond regions 5 of surface1A (FIG. 2), 2A (FIG. 3), or both 1A and 2A. For example, metalsincluding but not limited to Cu, Au, Pt, or any combination or alloythereof may be deposited on the weak bond regions 5. Upon bonding oflayers 1 and 2, the weak bond regions 5 will be weakly bonded. Thestrong bond regions may remain untreated (wherein the bond strengthdifference provides the requisite strong bond to weak bond ratio withrespect to weak bond layers 5 and strong bond regions 6), or may betreated as described above or below to promote strong adhesion.

A further treatment technique involves use of one or more adhesionpromoters 11 at the strong bond regions 6 on surfaces 1A (FIG. 10), 2A(FIG. 11), or both 1A and 2A. Suitable adhesion promoters include, butare not limited to, TiO(x), tantalum oxide, or other adhesion promoter.Alternatively, adhesion promoter may be used on substantially all of thesurface 1A and/or 2A, wherein a metal material is be placed between theadhesion promoter and the surface 1A or 2A (depending on the locale ofthe adhesion promoter) at the weak bond regions 5. Upon bonding,therefore, the metal material will prevent strong bonding a the weakbond regions 5, whereas the adhesion promoter remaining at the strongbond regions 6 promotes strong bonding.

Yet another treatment technique involves providing varying regions ofhydriphobicity and/or hydrophillicity. For example, hydrophilic regionsare particularly useful for strong bond regions 6, since materials suchas silicon may bond spontaneously at room temperature. Hydrophobic andhydrophilic bonding techniques are known, both at room temperature andat elevated temperatures, for example, as described in Q. Y. Tong, U.Goesle, Semiconductor Wafer Bonding, Science and Technology, pp. 49–135,John Wiley and Sons, New York, N.Y. 1999, which is incorporated byreference herein.

A still further treatment technique involves one or more exfoliationlayers that are selectively irradiated. For example, one or moreexfoliation layers may be placed on the surface 1A and/or 2A. Withoutirradiation, the exfoliation layer behaves as an adhesive. Upon exposureto irradiation, such as ultraviolet irradiation, in the weak bondregions 5, the adhesive characteristics are minimized. The usefulstructures may be formed in or upon the weak bond regions 5, and asubsequent ultraviolet irradiation step, or other debonding technique,may be used to separate the layers 1 and 2 at the strong bond regions 6.

Referring to FIGS. 6 and 7, an additional treatment technique includesan implanting ions 12 (FIGS. 6 and 7) to allow formation of a pluralityof microbubbles 13 in layer 1 (FIG. 6), layer 2 (FIG. 7), or both layers1 and 2 in the weak regions 3, upon thermal treatment. Therefore, whenlayers 1 and 2 are bonded, the weak bond regions 5 will bond less thanthe strong bond regions 6, such that subsequent debonding of layers 1and 2 at the weak bond regions 5 is facilitated.

Another treatment technique includes an ion implantation step followedby an etching step. In one embodiment, this technique is carried outwith ion implantation through substantially all of the surface 1B.Subsequently, the weak bond regions 5 may be selectively etched. Thismethod is described with reference to damage selective etching to removedefects in Simpson et al., “Implantation Induced Selective ChemicalEtching of Indium Phosphide”, Electrochemical and Solid-State Letters,4(3) G26–G27, which is herein incorporated by reference.

A still further treatment technique realizes one or more layersselectively positioned at weak bond regions 5 and/or strong bond regions6 having radiation absorbing and/or reflective characteristics, whichmay be based on narrow or broad wavelength ranges. For example, one ormore layers selectively positioned at strong bond regions 6 may haveadhesive characteristics upon exposure to certain radiation wavelengths,such that the layer absorbs the radiation and bonds layers 1 and 2 atstrong bond regions 6.

One of skill in the art will recognize that additional treatmenttechnique may be employed, as well as combination comprising at leastone of the foregoing treatment techniques. The key feature of anytreatment employed, however, is the ability to form one or more regionof weak bonding and one or more regions of strong bonding, providingSB/WB bond strength ratio greater than 1.

The geometry of the weak bond regions 5 and the strong bond regions 6 atthe interface of layers 1 and 2 may vary depending on factors including,but not limited to, the type of useful structures formed on or inregions 3, the type of debonding/ bonding selected, the treatmenttechnique selected, and other factors. Referring to FIGS. 14–20, themultiple layer substrate 100 may have weak bond and strong bond regionswhich may be concentric (FIGS. 14, 16 and 18), striped (FIG. 1-5),radiating (FIG. 17), checkered (FIG. 20), a combination of checkered andannular (FIG. 19), or any combination thereof. Of course, one of skillin the art will appreciate that any geometry may be selected.Furthermore, the ratio of the areas of weak bonding as compared to areasof strong bonding may vary. In general, the ratio provides sufficientbonding (i.e., at the strong bond regions 6) so as not to comprise theintegrity of the multiple layer structure 100, especially duringstructure processing. Preferably, the ratio also maximizes usefulregions (i.e., weak bond region 5) for structure processing.

After treatment of one or both of the surfaces 1A and 2A insubstantially the locale of weak bond regions 5 and/or strong bondregions 6 as described above, layers 1 and 2 are bonded together to forma substantially integral multiple layer substrate 100. Layers 1 and 2may be bonded together by one of a variety of techniques and/or physicalphenomenon, including but not limited to, eutectic, fusion, anodic,vacuum, Van der Waals, chemical adhesion, hydrophobic phenomenon,hydrophilic phenomenon, hydrogen bonding, coulombic forces, capillaryforces, very short-ranged forces, or a combination comprising at leastone of the foregoing bonding techniques and/or physical phenomenon. Ofcourse, it will be apparent to one of skill in the art that the bondingtechnique and/or physical phenomenon may depend in part on the one ormore treatments techniques employed, the type or existence of usefulstructures formed thereon or therein, anticipated debonding method, orother factors.

Alternatively, a buried oxide layer may be formed at the bottom surfaceof the device layer. The oxide layer may be formed prior to selectivebonding of the device layer to the bulk substrate. Further, the oxidelayer may be formed by oxygen implanting to a desired buried oxide layerdepth.

There are various techniques for forming an oxide layer on the multiplelayer substrate. A first technique consists of forming the buried SiO₂layer in a silicon substrate by implanting oxygen at high dose followedby annealing at a temperature greater than 1300° C. Through ionimplantation, desired thicknesses of buried SiO₂ layer can be formed.

An alternate technique for forming a buried oxide layer consists offorming a thin SiO₂ film on a surface of the multiple layer substrate,then bonding the substrate to a second silicon substrate by means of theSiO₂ film. Known mechanical grinding and polishing processes are thenused to form a desired thickness silicon layer above the buried siliconoxide layer. The silicon oxide layer on the multiple layer substrate isformed by successively oxidizing the surface followed by etching theoxide layer formed in order to obtain the desired thickness.

Another technique for forming a buried oxide layer consists of forming,by oxidation, a thin silicon oxide layer on a first multiple layersubstrate, then implanting H⁺ ions in the first multiple layer substratein order to form a cavity plane under the thin silicon oxide layer.Subsequently, by means of the thin silicon oxide layer, this first bodyis bonded to a second multiple layer substrate and then the entireassembly is subjected to thermal activation in order to transform thecavity plane into a cleaving plane. This makes it possible to recover ausable SOI substrate.

Multiple layer substrate 100 thus may be provided to an end user (withor without a buried oxide layer). Alternatively, certain patterns ofconductors may be formed integral with the multiple layer substrate. Theend user may subsequently form one or more useful structures (not shown)in or upon regions 3, which substantially or partially overlap weak bondregions 5 at the interface of surfaces 1A and 2A. The useful structuresmay include one or more active or passive elements, devices, implements,tools, channels, other useful structures, or any combination comprisingat least one of the foregoing useful structures. For instance, theuseful structure may include an integrated circuit or a solar cell. Ofcourse, one of skill in the art will appreciate that variousmicrotechnology and nanotechnology based device may be formed.

For instance, active devices may be formed on the multiple layer SOIwafer or substrate. These active devices are formed in themonocrystalline silicon active layer on the buried oxide film of the SOIsubstrate. The thickness of the silicon active layer is dependent on thepurpose of the active devices formed therein. If the SOI elements areCMOS elements operating at high speed and low power consumption, thethickness of the active layer is about 50 to 100 nm. If the SOI elementsare high breakdown voltage elements, the thickness of the active layermay be several micrometers. An example of an active device is aprotective diode. A protective diode is a semiconductor element providedto a semiconductor device, to guide an over current from a connectionpin to a substrate and to the outside of the semiconductor device, tothereby protecting an internal circuit of the semiconductor device.

It will be apparent to one skilled in the art that other active devicesmay be fabricated with selective doping and masking of active regions ofthe either the monocrystalline silicon substrate or SOI substrate. Theseactive devices may include, but are not limited to, bipolar junctiontransistors, metal-oxide-semiconductor transistors, field effecttransistors, diodes, insulated gate bipolar transistors, and the like.

Another active device which may be fabricated on the multiple layersubstrate are MEMS devices. Generally, MEMS devices have compriseelectrodes and actuatable elements disposed opposite electrodesfabricated on a substrate. The actuatable elements transfer controlsfrom the electrodes to provide electrical control over machinestructures. One technique for manufacturing MEMS devices is by bulkmicromachining the substrate using deep etch processing, which isconsidered a subtractive fabrication technique because it involvesetching away material from a single substrate layer to form the MEMSstructure. The substrate layer can be relatively thick, on the order oftens of microns, and the sophistication of this process allows for themicromachining of different structures in the substrate such ascantilevers, bridges, trenches, cavities, nozzles and membranes.

Another technique for manufacturing MEMS devices on the multiple layersubstrate is by surface micromachining techniques. It is considered anadditive process because alternate structural layers and sacrificialspacer layers are “built-up” to construct the MEMS structure with thenecessary mechanical and electrical characteristics. Polycrystallinesilicon (polysilicon) is the most commonly used structural material andsilicon oxide glass is the most commonly used sacrificial material. Intraditional micromachining processes, these layers are formed inpolysilicon/oxide pairs on a silicon substrate isolated with a layer ofsilicon nitride. The layers are patterned using photolithographytechnology to form intricate structures such as motors, gears, mirrors,and beams. As the layers are built up, cuts are made through the oxidelayers and filled with polysilicon to anchor the upper structural layersto the substrate or to the underlying structural layer.

After one or more structures have been formed on one or more selectedregions 3 of layer 1, layer 1 may be debonded by a variety of methods.It will be appreciated that since the structures are formed in or uponthe regions 4, which partially or substantially overlap weak bondregions 5, debonding of layer 1 can take place while minimizing oreliminating typical detriments to the structures associated withdebonding, such as structural defects or deformations.

Debonding may be accomplished by a variety of known techniques. Ingeneral, debonding may depend, at least in part, on the treatmenttechnique, bonding technique, materials, type or existence of usefulstructures, or other factors.

Referring in general to FIGS. 21–32, debonding techniques may be basedon implantation of ions or particles to form microbubbles at a referencedepth, generally equivalent to thickness of the layer 1. The ions orparticles may be derived from oxygen, hydrogen, helium, or otherparticles 14. The impanation may be followed by exposure to strongelectromagnetic radiation, heat, light (e.g., infrared or ultraviolet),pressure, or a combination comprising at least one of the foregoing, tocause the particles or ions to form the microbubbles 15, and ultimatelyto expand and delaminate the layers 1 and 2. The implantation andoptionally heat, light, and/or pressure may also be followed by amechanical separation step (FIGS. 23, 26, 29, 32), for example, in adirection normal to the plane of the layers 1 and 2, parallel to theplane of the layers 1 and 2, at another angle with to the plane of thelayers 1 and 2, in a peeling direction (indicated by broken lines inFIGS. 23, 26, 29, 32), or a combination thereof. Ion implantation forseparation of thin layers is described in further detail, for example,in Cheung, et al. U.S. Pat. No. 6,027,988 entitled “Method Of SeparatingFilms From Bulk Substrates By Plasma Immersion Ion Implantation”, whichis incorporated by reference herein.

Referring particularly to FIGS. 21–23 and 24–26, the interface betweenlayers 1 and 2 may be implanted selectively, particularly to formmicrobubbles 17 at the strong bond regions 6. In this manner,implantation of particles 16 at regions 3 (having one or more usefulstructures therein or thereon) is minimized, thus reducing thelikelihood of repairable or irreparable damage that may occur to one ormore useful structures in regions 3. Selective implantation may becarried out by selective ion beam scanning of the strong bond regions 4(FIGS. 24–26) or masking of the regions 3 (FIGS. 21–23). Selective ionbeam scanning refers to mechanical manipulation of the structure 100and/or a device used to direct ions or particles to be implanted. As isknown to those skilled in the art, various apparatus and techniques maybe employed to carry out selective scanning, including but not limitedto focused ion beam and electromagnetic beams. Further, various maskingmaterials and technique are also well known in the art.

Referring to FIGS. 27–29, the implantation may be effectuatedsubstantially across the entire the surface 1B or 2B. Implantation is atsuitable levels depending on the target and implanted materials anddesired depth of implantation. Therefore, where layer 2 is much thickerthan layer 1, it may not be practical to implant through surface 2B;however, if layer 2 is a suitable implantation thickness (e.g., withinfeasible implantation energies), it may be desirable to implant throughthe surface 2B. This minimizes or eliminates possibility of repairableor irreparable damage that may occur to one or more useful structures inregions 3.

In one embodiment, and referring to FIGS. 30–32 in conjunction with FIG.18, strong bond regions 6 are formed at the outer periphery of theinterface between layers 1 and 2. Accordingly, to debond layer 1 formlayer 2, ions 18 may be implanted, for example, through region 4 to formmicrobubbles at the interface of layers 1 and 2. Preferably, selectivescanning is used, wherein the structure 100 may be rotated (indicated byarrow 20), a scanning device 21 may be rotated (indicated by arrow 22),or a combination thereof. In this embodiment, a further advantage is theflexibility afforded the end user in selecting useful structures forformation therein or thereon. The dimensions of the strong bond region 6(i.e., the width) are suitable to maintain mechanical and thermalintegrity of the multiple layer substrate 100. Preferably, the dimensionof the strong bond region 6 is minimized, thus maximizing the area ofweak bond region 5 for structure processing. For example, strong bondregion 6 may be about one (1) micron on an eight (8) inch wafer.

Further, debonding of layer 1 from layer 2 may be initiated by otherconventional methods, such as etching (parallel to surface), forexample, to form an etch through strong bond regions 6. In suchembodiments, the treatment technique is particularly compatible, forexample wherein the strong bond region 6 is treated with an oxide layerthat has a much higher etch selectivity that the bulk material (i.e.,layers 1 and 2). The weak bond regions 5 preferably do not requireetching to debond layer 1 from layer 2 at the locale of weak bondregions 5, since the selected treatment, or lack thereof, preventedbonding in the step of bonding layer 1 to layer 2.

Alternatively, cleavage propagation may be used to initiate debonding oflayer 1 from layer 2. Again, the debonding preferably is only requiredat the locale of the strong bond regions 6, since the bond at the weakbond regions 5 is limited. Further, debonding may be initiated byetching (normal to surface), as is conventionally known, preferablylimited to the locales of regions 4 (i.e., partially or substantiallyoverlapping the strong bond regions 6).

In another embodiment, and referring now to FIG. 85, a method ofdebonding is shown. The method includes providing a multiple layeredsubstrate 100; processing one or more useful structures (not shown) inthe WB regions 5; etching away at the SB regions 6, preferably at atapered angle (e.g., 45 degrees); subjecting the device layer,preferably only the etched SB region 6, to low energy ion implantation;and peeling or otherwise readily removing the device layer portions atthe WB region. Note that while two device layer portions at the WB layerare shown as being removed, it is understood that this may be used tofacilitate release on one device layer portion. The tapered edge of theWB region mechanically facilitates removal. Beneficially, much lower ionimplant energy may be used as compared to implant energy required topenetrate the original device layer thickness.

Layers 1 and 2 may be the same or different materials, and may includematerials including, but not limited to, plastic (e.g., polycarbonate),metal, semiconductor, insulator, monocrystalline, amorphous,noncrystalline, biological (e.g., DNA based films) or a combinationcomprising at least one of the foregoing types of materials. Forexample, specific types of materials include silicon (e.g.,monocrystalline, polycrystalline, noncrystalline, polysilicon, andderivatives such as Si₃N₄, SiC, SiO₂), GaAs, InP, CdSe, CdTe, SiGe,GaAsP, GaN, SiC, GaAlAs, InAs, AlGaSb, InGaAs, ZnS, AlN, TiN, othergroup IIIA–VA materials, group IIB materials, group VIA materials,sapphire, quartz (crystal or glass), diamond, silica and/or silicatebased material, or any combination comprising at least one of theforegoing materials. Of course, processing of other types of materialsmay benefit from the process described herein to provide multiple layersubstrates 100 of desired composition. Preferred materials which areparticularly suitable for the herein described methods includesemiconductor material (e.g., silicon) as layer 1, and semiconductormaterial (e.g., silicon) as layer 2, other combinations include, but arenot limited to; semiconductor (layer 1) or glass (layer 2);semiconductor (layer 1) on silicon carbide (layer 2) semiconductor(layer 1) on sapphire (layer 2); GaN (layer 1) on sapphire (layer 2);GaN (layer 1) on glass (layer 2); GaN (layer 1) on silicon carbide(layer 2); plastic (layer 1) on plastic (layer 2), wherein layers 1 and2 may be the same or different plastics; and plastic (layer 1) on glass(layer 2).

Layers 1 and 2 may be derived from various sources, including wafers orfluid material deposited to form films and/or substrate structures.Where the starting material is in the form of a wafer, any conventionalprocess may be used to derive layers 1 and/or 2. For example, layer 2may consist of a wafer, and layer 1 may comprise a portion of the sameor different wafer. The portion of the wafer constituting layer 1 may bederived from mechanical thinning (e.g., mechanical grinding, cutting,polishing; chemical-mechanical polishing; polish-stop; or combinationsincluding at least one of the foregoing), cleavage propagation, ionimplantation followed by mechanical separation (e.g., cleavagepropagation, normal to the plane of structure 100, parallel to the planeof structure 100, in a peeling direction, or a combination thereof), ionimplantation followed by heat, light, and/or pressure induced layersplitting), chemical etching, or the like. Further, either or bothlayers 1 and 2 may be deposited or grown, for example by chemical vapordeposition, epitaxial growth methods, or the like.

An important benefit of the instant method and resulting multiple layersubstrate, or thin film derived from the multiple layer substrate isthat the structures are formed in or upon the regions 3, which partiallyor substantially overlap the weak bond regions 5. This substantiallyminimizes or eliminates likelihood of damage to the useful structureswhen the layer 1 is removed from layer 2. The debonding step generallyrequires intrusion (e.g., with ion implantation), force application, orother techniques required to debond layers 1 and 2. Since, in certainembodiments, the structures are in or upon regions 3 that do not needlocal intrusion, force application, or other process steps that maydamage, reparably or irreparable, the structures, the layer 1 may beremoved, and structures derived therefrom, without subsequent processingto repair the structures. The regions 4 partially or substantiallyoverlapping the strong bond regions 6 do generally not have structuresthereon, therefore these regions 4 may be subjected to intrusion orforce without damage to the structures.

The layer 1 may be removed as a self supported film or a supported film.For example, handles are commonly employed for attachment to layer 1such that layer 1 may be removed from layer 2, and remain supported bythe handle. Generally, the handle may be used to subsequently place thefilm or a portion thereof (e.g., having one or more useful structures)on an intended substrate, another processed film, or alternativelyremain on the handle.

One benefit of the instant method is that the material constitutinglayer 2 is may be reused and recycled. A single wafer may be used, forexample, to derive layer 1 by any known method. The derived layer 1 maybe selectively bonded to the remaining portion (layer 2) as describedabove. When the thin film is debonded, the process is repeated, usingthe remaining portion of layer 2 to obtain a thin film to be used as thenext layer 1. This may be repeated until it no longer becomes feasibleor practical to use the remaining portion of layer 2 to derive a thinfilm for layer 1.

Having thus described in detail formation of a selectively bondedmultiple layer substrate, formation of three-dimensional integratedcircuits now will be described using the selectively bonded multiplelayer substrate.

Referring to FIG. 80, an isometric schematic of a stack of 1 . . . Nwafers and a die cut therefrom is shown. For clarity, coordinates anddefinitions will be provided. The die and the stack of wafers generallyhave top and bottom surfaces, and interlayers, extending in the x and ycoordinate directions, generally referred to herein as planardirections. Note that the planar directions include any directionextending on the surfaces or interlayers. The several layers are stackedin the z direction, generally referred to herein as vertically or inthree dimensions. After die cutting, the die has, in addition to theinterlayers and top and bottom surfaces, four edge surfaces extendinggenerally in the z direction.

Referring now to FIG. 33, a selectively bonded substrate 100 isprovided, having strongly bonded regions 3 and weakly bonded regions 4,as described above. Although the embodiment shown has the strong bondingpattern generally of FIG. 18, it is understood that any pattern ofstrong bond regions 3 and weak bond regions 4 may be utilized, whereinthe circuitry or other useful devices are formed at the weak bondregions as described and mentioned above.

Notably, the present invention is advantageous over aforementioned IBMU.S. Pat. No. 6,355,501 in that various additional functionality may beprovided, as well as performance enhancement, while reducing the numberof sequential processing steps.

For exemplary purposes, a region is shown with a dashed circle, andalternatives of this region will be described in various exploded viewsto explain formation of circuit regions suitable for three-dimensionalstacking.

Referring to FIG. 34, one example of a circuit portion is shown havingchip edge interconnect architecture suitable for three-dimensionalintegration. Further details for edge interconnect architectures may befound in Faris U.S. Pat. Nos. 5,786,629 and 6,355,976, both of which areincorporated by reference herein.

A circuit portion C is formed within an insulating region I of thedevice layer of the selectively bonded layered substrate. A conductor W,which may be an electrical or an optical conductor, is formed, operablyoriginating at the circuit portion and extending to the edge of thecircuit package, represented by the dash-dot lines. The conductor W mayextend in any direction generally in the x-y plane. The bulk regionserves as mechanical and thermal support during processing of thecircuit portion and the conductor.

It should be appreciated that while only a single conductor is shown (inall of the embodiments hereinbefore and hereinafter), a plurality ofconductors may be provided associated with each circuit portionextending in any direction generally in the x-y plane. The conductorsThese conductors may serve to encode each circuit portion with its ownaddress; receive address information from external address lines; bringdata and power to each circuit portion; receive data from circuitportions (memory); or other desired functionality. When multipleconductors are used, they may be independent or redundant.

In one embodiment, particularly wherein several independent conductorsare formed, overlapping regions are insulated as is known insemiconductor processing.

The circuit portions may be the same or different, and may be formedfrom various transistor and diode arrangements. These devices include(within the same vertically integrated circuit) the same or differentmicroprocessors (electrical or optical) (bipolar circuits, CMOScircuits, or any other processing circuitry), memory circuit portionssuch as one-device memory cells, DRAM, SRAM, Flash, signal receivingand/or transmission circuit functionality, or the like. Thus, variousproducts may be formed with the present methods. Integrated products mayinclude processors and memory, or processors, memory signal receivingand/or transmission circuit functionality, for a variety of wired andwireless devices. By integrating vertically (in the z direction),extremely dense chips may improve processing speed or memory storage bya factor of up to N (N representing the total number of integratedlayers, and may be in the 10s, 100s or even 1000s in magnitude).

Referring to FIG. 35, a handler is used to assist in removal of thedevice layer. As described above, the strong bond regions generally aresubjected to steps to facilitate debonding, such as ion implantation.The device layer may then readily be removed as described above (e.g.,with respect to FIGS. 23, 26, 29 and 32) without conventional grindingand other etch-back steps. Since the circuit portions and conductors areformed in weak bond regions, these are generally not damaged during thisremoval step. In one preferred embodiment, the handler used is thatdescribed in PCT patent application Ser. PCT/US/02/31348 filed on Oct.2, 2002 and entitled “Device And Method For Handling Fragile Objects,And Manufacturing Method Thereof,” which is incorporated by referenceherein in its entirety.

The device layer having plural circuit portions and edge extendingconductors are then aligned and stacked as shown in FIG. 36 anddescribed in further detail herein. The layers are aligned and stackedsuch that plural circuit portions form a vertically integrated stack.Depending on the desired vertically integrated device, the circuitportions for each layer may be the same or different.

In a preferred embodiment, the N layers are stacked, and subsequentlyall N layers are bonded in a single step. This may be accomplished, forexample, by using UV or thermal cured adhesive between the layers. Notethat, since interconnects are at the edges of each chip, in certainembodiments it may not be detrimental to expose the circuit portionitself to adhesive, though not required, which may reduce processingsteps and ultimately cost.

Referring now to FIG. 37, each stack of circuit portions are dicedaccording to known techniques. In the event that the dicing does notprovide a smooth, planar edge, the wiring edge may be polished to exposethe conductors for each circuit portion.

FIG. 38 shows edge interconnection of the plural circuit portions with aconductor W′ (electrical or optical). This may be accomplished bymasking and etching a deposited thin-film of conducting material in awell known manner to electrically contact the conductor of each circuitportion. Other interconnection schemes are described in more detail inthe aforementioned U.S. Pat. Nos. 5,786,629 and 6,355,976.

Of notable importance is that the edge interconnects can providefunctionality during processing of the vertically integrated chip and inthe end product (the vertically integrated chip). During processing, theedge interconnects may be used for diagnostic purposes. Malfunctioningcircuit portions may then be avoided during interconnection of theplural circuit portions. Alternatively, such malfunctioning circuitportions may be repaired. As a still further alternative, a stack of Ncircuit portions may be reduced (i.e., cut horizontally along the planeof the circuit portion) to eliminate the malfunctioning circuit portion,providing two or more stacks less than N. This may dramatically increaseoverall yield of known good dies (KGD), as instead of discarding a stackN with one or more malfunctioning circuit portions, two or more stackseach having less than N circuit portion layers may be used for certainapplications.

Referring back to FIG. 38, in an alternative embodiment, a verticallyintegrated stack of edge interconnects can provide vertical integrationwith a second vertically integrated chip of the invention. As can beseen in FIG. 38, the integrated stack of edge interconnects is rotatedabout its vertical axis to form, in effect, a wiring stack. By bondingthe rotated integrated stack of edge interconnects to the secondvertically integrated chip, wiring flexibility can be achieved. Forinstance, the rotated integrated stack of edge interconnects can providemore than one layer of wiring flexibility on a horizontal scale. This isuseful, for instance, with control circuitry needed for a massive datastorage chip where multiple address lines and control circuitry isrequired for addressability and control.

In a further embodiment, edge interconnects may be used for massivestorage addressing (MSA), for example as described in aforementionedU.S. Pat. No. 6,355,976.

Referring to FIG. 39, another example of a circuit portion is shown,having through interconnect architecture suitable for three-dimensionalintegration. A circuit portion C is formed within an insulating region Iof the device layer of the selectively bonded layered substrate. Aconductor W, which may be an electrical or an optical conductor, isformed, operably originating at the circuit portion and extending to thebottom of the device layer of the multiple layer substrate. Each circuitpackage is represented by the dash-dot lines. The bulk region serves asmechanical and thermal support during processing of the circuit portionand the conductor. The conductors W (a plurality of which may beassociated with each circuit portion, as mentioned above) may extend tothe edge of the bottom of the device layer, or alternatively may extendin the direction of the edge of the bottom of the device layer, wherebypolishing steps are performed to expose the conductors for verticalinterconnect.

A handler then may be utilized to remove the device layer, generally asshown in FIG. 35.

The device layer having plural circuit portions and through conductorsare then aligned and stacked as shown in FIG. 40 and described infurther detail herein. The layers are aligned and stacked such thatplural circuit portions form a vertically integrated stack. Depending onthe desired vertically integrated device, the circuit portions for eachlayer may be the same or different.

In a preferred embodiment, the N layers are stacked, and subsequentlyall N layers are bonded in a single step. This may be accomplished, forexample, by using UV or thermal cured adhesive between the layers. Toavoid contact problems between vertical layers, adhesive at the contactsshould be avoided.

As best shown in FIG. 41, each stack of circuit portions is dicedaccording to known techniques.

Referring to FIG. 42, another example of a circuit portion is shown,having a hybrid edge interconnect and through interconnect architecturesuitable for three-dimensional integration. A circuit portion C isformed within an insulating region I of the device layer of theselectively bonded layered substrate. A conductor W_(t), which may be anelectrical or an optical conductor, is formed, operably originating atthe circuit portion and extending to the bottom of the device layer ofthe multiple layer substrate. It will be understood that W_(t) may alsobe a mechanical coupler for use in, for example, a MEMS device. Anotherconductor W_(e) is provided operably originating at the circuit portionand extending to the edge of the circuit package, represented by thedash-dot lines. The bulk region serves as mechanical and thermal supportduring processing of the circuit portion and the conductor. Theconductors W_(t) (a plurality of which may be associated with eachcircuit portion, as mentioned above) may extend to the edge of thebottom of the device layer, or alternatively may extend in the directionof the edge of the bottom of the device layer, whereby polishing stepsare performed to expose the conductors for vertical interconnect. Itwill be understood that the W_(t) and W_(e) can be fabricated topredetermined locations along the wafer so that edge extendingconductors can be fabricated anywhere along the wafer edge.

A handler then may be utilized to remove the device layer, generally asshown in FIG. 35. The device layer having plural circuit portions andedge extending conductors are then aligned and stacked as shown in FIG.43 and described in further detail herein. The layers are aligned andstacked such that plural circuit portions form a vertically integratedstack. Depending on the desired vertically integrated device, thecircuit portions for each layer may be the same or different.

In a preferred embodiment, the N layers are stacked, and subsequentlyall N layers are bonded in a single step bonded. This may beaccomplished, for example, by using UV or thermal cured adhesive betweenthe layers.

Referring now to FIG. 44, each stack of circuit portions are dicedaccording to known techniques. In the event that the dicing does notprovide a smooth, planar edge, the wiring edge may be polished to exposethe conductors W_(e) for each circuit portion.

FIG. 45 shows one aspect of the overall interconnection, the edgeinterconnection of the plural circuit portions with a conductor W′(electrical or optical). This may be accomplished by masking and etchinga deposited thin-film of conducting material in a well known manner toelectrically contact a conducting portion of each circuit portion. Otherinterconnection schemes are described in more detail in theaforementioned U.S. Pat. Nos. 5,786,629 and 6,355,976. Note that whenboth edge and through interconnects are used, one or both types may beused to interconnect the circuit portions. The different interconnectsmay be redundant or independent. Alternatively, the edge interconnectsmay be provided mainly for diagnostic purposes, as described above. In afurther alternative embodiment, both types of interconnect may be usedto provide redundancy, thereby reducing the likelihood of verticallyintegrated chip malfunctions due to interconnect between chip portions.

To form the through conductors (as shown in FIGS. 39 and 42), eachthrough conductor for each chip portion may first be formed (e.g., byetching a hole and filling the hole with conductive material), and thecircuit portion subsequently formed atop the conductor.

Alternatively, and referring to FIG. 46, the circuit portion C may beformed first on or in the device layer, and the through conductor Wextending from the top of the circuit portion to the top of the devicelayer. The region above the circuit portion may be processed to providethe conductor W and insulating material I (e.g., the same material asthe insulator for optimal compatibility) as shown.

Referring now to FIG. 47 where like reference characters refer to samestructures as in previous FIG. 46, another optional feature to enhanceinterconnection of the vertical circuit portions is shown. Generally atthe top of each circuit portion, a conductor W_(b) is provided. Thisconductor W_(b) serves to optimize conduction from the through conductorW_(t) of the layer above upon stacking. This conductor may comprisesolidified material such that the contact derived upon stacking issufficient to provide contact between layers. Alternatively, theconductor W_(b) may comprise a solder bump, such that adjacentconductors may be joined by heating. Further alternatively, theconductor W_(b) may comprise electrical connection between adjacentcircuit portions. Still further, the conductor W_(b) may compriseoptical waveguides for purely optical connections. The joinder of theconductors may be accomplished as each layer is stacked, or preferablyafter all N layers have been stacked so as to minimize detriment toconducting connections caused by several reflow operations, as describedin the aforementioned IBM U.S. Pat. No. 6,355,501.

In another method to form the through conductors (shown in FIGS. 39 and42), and referring now FIGS. 48–50, separate device layers may form thecircuit portion layer. Referring to FIG. 48 there is shown a devicelayer having circuit portions each having a conductor W_(b) intended forcontact with another device layer having the through contacts. Theconductor W_(b) may have a solder bump or a solidified permanentconductor. Note that a second conductor W_(b) portion may be provided asdescribed hereinabove with reference to FIG. 47 for conduction from thethrough conductor W_(t) of the layer above upon stacking. FIG. 49 showsa device layer having through connects W_(t). The layers may be stacked,bonded, and electrical contacts joined, as shown in FIG. 50 to provide asub-stack comprising the circuit portion layer and the conductor layer.

Referring now to FIG. 51, an alternative circuit portion layer is shown.A buried oxide layer (BOx) is formed in the device layer generally atthe interface of the bulk substrate and the device layer. This buriedoxide layer may be formed by various methods known in the art, such asion implantation of O⁺ ions. Further, the buried oxide layer may beformed before or after the device layer is selectively bonded to thebulk substrate.

In embodiments where the buried oxide layer is formed before the devicelayer is selectively bonded to the bulk substrate, a SiO_(x) layer maybe formed at the surface of the device layer prior to selective bondingto the bulk substrate. The device layer is then selectively bonded tothe bulk substrate. Note that it may be desirable to treat the oxidelayer prior to bonding to enhance strong bonding.

In embodiments where the buried oxide layer is formed after the devicelayer is selectively bonded to the bulk substrate, the device layer maybe, for example, oxygen implanted to form the oxide layer at the desireddepth, i.e., at the interface of the bulk substrate and the devicelayer. It may be desirable to mask the intended strong bond regions ofthe device layer to locally prevent oxidation of the strong bondregions.

After formation of the buried oxide layer, circuit portions C are formedadjacent the buried oxide layer in the weak bond region of the devicelayer. Conductors W2 are formed (e.g., deposited) in electrical oroptical contact with the circuit portions, and conductors W1 are inelectrical or optical contact with the conductors W2. Note thatconductors W1 and W2 may be formed in one step, or in plural steps.Also, while the conductors W1 and W2 are shown to form a T shape, theseconductors (or a single conductor serving the same purpose) may beL-shaped, rectangular, or any other suitable shape.

After the device layer is removed from the bulk substrate (as describedabove), the buried oxide layer is then exposed. As shown in FIG. 52, aregion of the buried oxide layer may be etched away, and a throughconductor W3 formed therein. This conductor W3 serves to interconnectwith a conductor W1 of an adjacent device layer upon stacking.

While the described method is similar in some aspects to those taught inaforementioned IBM U.S. Pat. No. 6,335,501 on a chip scale, the presentmethod has several advantages. In the aforementioned IBM U.S. Pat. No.6,335,501, the removal of the bulk substrate is exclusively by grindingand etch back, whereas in the present method, peeling or other easyremoval methods are possible due to the formation of the circuitportions on the weak bond regions and the existence of the strongbonding regions for supporting the layer to the bulk support substrate,as described above. Further, the present method is attainable on a waferscale. Satisfactory yields may result by testing the layers, andsubsequently utilizing the stacks of N layers, and those stacks havingless than N layers, as described above.

Referring now to FIG. 53, an embodiment of an alternative circuitportion layer and associated conductors is shown. A buried oxide layer(BOx) is formed in the device layer generally at the interface of thebulk substrate and the device layer. A conductor is formed on the BOx atthe region where the circuit portion is to be formed. The circuit regionis formed, and conductors W2 and W3 (or an integral conductor) is formedatop the circuit portion. Note that the conductor (or conductor portion)W1 is formed with tapered edges and a protruding ventral portion.—thisserves to, among other things, facilitate alignment and enhancemechanical integrity of the conductor.

Referring now to FIG. 54, after the device layer is removed from thebulk substrate (as described above, preferably by peeling), the buriedoxide layer is then exposed (e.g., etched away) to form W3 regions.Preferably, these regions match the shape and size of the tapered edgedconductor or conductor portion W1.

As shown in FIG. 55, a solder plug is provided to ultimately form theconductor W3, in the W3 region. This conductor W3 serves to interconnectwith a conductor W1 of an adjacent device layer upon stacking, as shownin FIG. 56.

In one embodiment, the stacked layers may be reflowed as the layers arestacked. In a preferred embodiment, the entire stack is subject toreflow processing after N layers are formed. In still anotherembodiment, the stack may be reflowed in sections.

It will be noted that the shape and taper of the conductors W1 and W3 ofseparate layers further serve to assist in mechanically aligning thestacked layers.

Referring now to FIG. 64, a further embodiment of a device layer forforming a three-dimensional circuit or memory device is shown. A buriedoxide layer (BOx) is formed in the device layer generally at theinterface of the bulk substrate and the device layer. This buried oxidelayer may be formed by various methods known in the art. Further, theburied oxide layer may be formed before or after the device layer isselectively bonded to the bulk substrate. Note that the device layerhaving the BOx layer may be removed as described above to derive a “raw”SOI wafer layer that may be provided to a customer or stored for laterprocessing. In embodiments where the buried oxide layer is formed beforethe device layer is selectively bonded to the bulk substrate, an a SiO₂layer may be formed at the surface of the device layer prior toselective bonding to the bulk substrate. The device layer is thenselectively bonded to the bulk substrate. Note that it may be desirableto treat the oxide layer prior to bonding to enhance strong bonding, orto mask the intended strong bond regions of the device layer to locallyprevent oxidation.

In embodiments where the buried oxide layer is formed after the devicelayer is selectively bonded to the bulk substrate, the device layer maybe, for example, oxygen implanted to form the oxide layer at the desireddepth, i.e., at the interface of the bulk substrate and the devicelayer.

After formation of the buried oxide layer, circuit portions C are formedadjacent the buried oxide layer in the weak bond region of the devicelayer. One or more conductors W are. formed (e.g., deposited) inelectrical or optical contact with the circuit portions, and may extendto any dimensional edge of the chip, as described above.

After the device layer is removed from the bulk substrate (as describedabove), the buried oxide layer is then exposed. The BOx layer may serveas a transparent insulator layer, and may serve to shield one layer fromanother when layers are stacked, as described herein. Further, the Boxlayer provides a ready insulator for use in isolating circuit portionsor to provide noise shielding among the conductors. Further, holes maybe etched in the BOx layer, as described above with reference to, e.g.,FIGS. 52 and 54, and as described in the aforementioned IBM U.S. Pat.No. 6,355,501.

Referring back to FIG. 57, another example of a circuit portion is shownhaving chip edge interconnect architecture suitable forthree-dimensional integration. Further details for edge interconnectarchitectures may be found in the aforementioned Faris U.S. Pat. Nos.5,786,629 and 6,355,976. In this embodiment, a circuit portion C isformed within an insulating region I of the device layer of theselectively bonded layered substrate. Here, conductors are formed onmultiple edges of each circuit portion, represented as WL, WR and WR/WL.Note, however, that conductors may also or optionally extend indirections perpendicular to the layer in all directions (e.g., to allfour major edges of the circuit portion).

The device layer having plural circuit portions and multiple edgeextending conductors are then aligned and stacked as shown in FIG. 58.The layers are aligned and stacked such that plural circuit portionsform a vertically integrated stack. Depending on the desired verticallyintegrated device, the circuit portions for each layer may be the sameor different. Further, although edge interconnects are shown on eachlayer, it is contemplated that certain layers may have one, two, threeor four edge interconnects. It is further contemplated that some layersmay have only through interconnects (one or more). It is still furthercontemplated that some layers may have one, two, three or four edgeinterconnects and one or more through interconnects. In a preferredembodiment, the N layers are stacked, and subsequently all N layers arebonded in a single step. This may be accomplished, for example, by usingUV or thermal cured adhesive between the layers. Note that, sinceinterconnects are generally at the edges of each chip, in certainembodiments it may not be detrimental to expose the circuit portionitself to adhesive, though not required, which may reduce processingsteps and ultimately cost.

Referring now to FIG. 59, each stack of circuit portions are dicedaccording to known techniques. In the event that the dicing does notprovide a smooth, planar edge, the wiring edge may be polished to exposethe conductors for each circuit portion.

Referring to FIG. 60 there is shown edge interconnection of the pluralcircuit portions with conductors W′R and W′L (electrical or optical),although it is contemplated that some or all layers may also have edgeinterconnects perpendicular to the page (to and/or fro). This may beaccomplished by masking and etching a deposited thin-film of conductingmaterial in a well known manner to electrically contact the conductor ofeach circuit portion. Other interconnection schemes are described inmore detail in the aforementioned U.S. Pat. Nos. 5,786,629 and6,355,976.

Of importance is that the edge interconnects can provide functionalityduring processing of the vertically integrated chip and in the endproduct (the vertically integrated chip). During processing, the edgeinterconnects may be used for diagnostic purposes. Various options areavailable. For example, one or more of the edge interconnects may be fordiagnosis and the other(s) for power, data, memory access, or otherfunctionality of the individual circuit portion. One or more of the edgeinterconnects may be redundant, to improve device yield. The edgeinterconnects may independently access different areas of the circuitportion for increased functionality. Massive storage addressing is alsocapable, as customized interconnects may be provided in high densitystorage devices.

FIG. 61 shows an isometric view of a vertically integrated chip, shownwithout interconnects W′. FIG. 62 shows a possible vertically integratedchip shown with interconnects W. Note that various combinations ofinterconnections W′ may be provided, depending on the desiredfunctionality. The use of one, two, three or four edges, as well asoptional through conductors (e.g., at the top and bottom layers of thestack), further allows for orders of magnitude more interconnectlocations (as compared to through interconnects alone) and very hightraffic interconnect, using up to all 6 sides (or more if othergeometries are provided) of the three dimensional vertically integratedchip. Further, multiple conductors may extend from each edge, e.g.,associated with different portions of the circuit portion at theparticularly layer, or redundant.

Referring to FIG. 63, another example of a circuit portion is shownhaving chip edge interconnect architecture suitable forthree-dimensional integration. In this embodiment, a circuit portion Cis formed within an insulating region I of the device layer of theselectively bonded layered substrate. Here, one or more conductors areformed across the surface of the device layer atop the circuit portions.Generally, the portions extending (right and left as shown in the FIG.63) across the chip portion are provided for redundancy, to increaseyield in the event that one side malfunctions or is not able to beinterconnected in fabrication of the vertically integrated chip. Notethat, as described above, multiple conductors may be provided across thewafer, e.g., to access different regions of the circuit portions.

Referring now to FIGS. 81 and 82, a comparison of the present invention(FIG. 81) with the method disclosed of aforementioned IBM Patent No.6,355,501 (FIG. 82). FIG. 82 (IBM) shows a SOI device on a BOx layer.Metalization is provided only in the Z direction, i.e., vertical throughconnects, at the top and bottom of the SOI device. Notably, with thepresent invention, edge interconnect is provided as shown, and, asdescribed above, inter alia, provides enhanced device efficiency,reduces overall processing steps, and allows for improved functionalitysuch as diagnostic and enhanced and simplified interconnections.

In certain embodiments, it may be desirable to enhance the interconnectof wafer scale or chip scale stacked devices described herein, byincreasing size (contact area), conductivity (reducing resistivity), orboth.

Referring now to FIG. 83, one embodiment of enhancing edge interconnectconductivity is shown. In general, ion implantation provide excessivedoping (n++ or p++) in the region of the (e.g., under) metalizationlayer. Such n++or p++doping is known in the art. Thus, interconnectsprovided in this manner enhance overall conductivity, e.g., forconnecting to edge exposed conductors. This step may occur before orafter metalization, and generally before the device layer includingcircuit portions having metalization is removed (or before individualdevices are removed).

In another method to form interconnects, particularly throughinterconnects, thermo-electric migration processing may be used.Aluminum or other suitable conductive metal capable of thermo-electricmigration is deposited on top of a silicon layer. Upon application of anelectrical field at elevated temperatures (e.g., above 200 C), aluminummigrates through the substrate providing a conductive path. This processmay be used to form through interconnects of at least up to 10micrometers in thickness (migration direction). The thermo-electricmigration processing is performed on a device layer of a multiple layersubstrate, leaving through interconnects for circuit portions to beformed on the device layer. Alternatively, the layer may be subject tothermoelectric migration prior to selectively bonding the device layerto the bulk layer.

Referring to FIG. 88, a plug fill method of enhancing contact area andconductivity is shown. A tapered etch, e.g., generally at a 45 degreeangle for preferential etching, is formed in the substrate. A conductoris formed across the top of the substrate, and traversed into thetapered etched region. Note that small angles (preferably less than 60,more preferably less than 45 degrees) are desired to minimize thelikelihood of mechanical failure of the conductor. The tapered etchedregion is then plug filled with suitable conductive material.

This tapered etched portion is preferably located at edges dies as willbe apparent. The plug is cut along the cut line, exposing the conductiveplug material and the conductor. Several layers may be stacked and edgeconnected, whereby contact resistance is significantly minimized by theexistence of the conductive plug portions.

Via holes may be etched (e.g., preferably a tapered etch of about 45degrees) for access to formed metalization. The via hole is plugged withmeltable or sinterable conductive material. Referring to FIG. 89, athrough interconnect formed with the present method is described. Notethat the metalization extending in the x-y plane may extend as edgeconnects. A tapered via hole is etched in the lower layer. Metalizationis formed therein, and the via is plug filled with meltable orsinterable material. A subsequent layer is formed atop the first layer.A tapered via hole is etched in the upper layer. Metalization is formedon the top layer, and the via is plug filled with meltable or sinterablematerial.

In one embodiment, the conductive plug material is sintered or melted asthe layers are stacked. This may further serve for alignment bonding,i.e., not temporary bonding, in that it will not be removed as the jointis a contact, and not always sufficient bond strength to serve as thesole permanent bond.

Preferably, the meltable or sinterable conductive material is not meltedor sintered until the final bonding step, preferably fusion or otherbonding suitable to also melt or sinter the conductive plug material.The customer may be provided with the layered devices after fusion andconductive melting/sintering, or before fusion and conductivemelting/sintering.

By providing one or more edge interconnects, as compared to only throughinterconnects as described in the aforementioned IBM U.S. Pat. No.6,355,501 various additional features may be provided that would not befeasible with through interconnects. For example, referring back to FIG.65, shielding layers may be provided between adjacent layers. Thisprevents cross noise between circuit portion layers.

With through connects, noise radiates from one layer to the next. Thisis a known problem in vertically stacked circuits. Because preferredembodiments of the present invention rely on edge connects, a shieldinglayer is provided. The shielding layer is formed of a material such ascopper, tungsten, molybdenum, or other conductive material. In certainembodiments, this shielding layer further serves to remove heat. Theshielding layer and the adjacent metalization layers are suitablyinsulated as is known in the art. Beneficially, any noise created by onelayer is not transmitted to adjacent layers. This is particularlydesirable for mixed vertically integrated circuits, includingcombinations selected from the group of useful devices consisting ofpower, analog, RF, digital, optical, photonic, MEMs, microfluidics, andcombinations comprising at least one of the foregoing types of usefuldevices. The shielding layer may further be used in optical connectedcircuits so as to form cladding layers.

This shielding layer may also serve as a ground plane to create ultrahigh speed and ultra wide bandwidth transmission lines as is well knownin the art. Note that IBM U.S. Pat. No. 6,355,501 may not include suchshielding layers, as the methods therein teach only through connects.

Referring to FIG. 66, channels may be provided between layers, to allowfor heat dissipation. The channels for heat removal may carry fluid(liquid or gas) for heat removal. For example, the channels may allowfor passive air or other separate cooling fluid to flow through thelayers for cooling. Alternatively, microfluidics pumps or other devicesmay be included to provided air or other optional fluid cooling asdiscreet layer.

Generally, for purposes of this discussion, it will be understood thatin the multilayer structure of the invention, microfluidic devices canadditionally be fabricated on the multilayer substrate. It will beunderstood that interconnects and via holes serve similar electricalfunctions to grooves, wells and channels of microfluidic devices. Asidefrom some electrokinetic microfluidic devices which required electricalor optical controls, most microfluidic devices are mechanical devicescomposed of microscale structures, with fabrication techniques commonlyused in integrated circuit fabrication. Therefore, one skilled in theart will understand that, as used herein, terms such as interconnects,conductors, electrodes and via holes may refer to ports, grooves, wells,and microchannels in the case of microfluidic devices.

For both MEMs devices and microfluidic devices, there must be adeconstruction of the desired device into a series of thin horizontalslices. Generally, the desired thickness is anywhere between 2 and 10microns. Each of these slices is created on a silicon wafer using one ofthe many MEMS or microfluidic known wafer processing techniques. Oncethe MEMS or microfluidic slice has been created on the top surface of awafer, the slice is peeled off the wafer and stacked on the top of theother slices making up the MEMS or microfluidic structure. Through thissuccessive peeling and stacking, a MEMS or microfluidic device up to acentimeter high, having complex internal structure and geometry, can becreated.

Referring to FIG. 67, these channels may include heat conductive portion(i.e., deposited metal) to further assist in heat dissipation.Alternatively, these channels may be formed as a waffle like structure,for example, as described in aforementioned U.S. Pat. No. 6,355,976.

Referring now to FIG. 68, the channels or other heat conductive portionsassociated with each circuit portion may be formed on the underside ofthe device layer when it is maintained by the handler.

These channels may be formed after formation of the circuit portions andconductors as described above. The shielding layer may optionally beformed directly on these channels to form the structures shown in FIGS.66 and 67.

Alternatively, the shield and/or heat conductive portions may be formedon the underside of the device layer prior to selective bonding of thedevice layer to the bulk substrate. Further, the shield and/or heatconductive portions may be formed as one or more separate layers thatare aligned, stacked and bonded to form the structures shown in FIGS.64–66.

In another embodiment, the channels may be formed prior to selectivelybonding the device layer to the bulk substrate. For example, asdescribed above, one treatment technique for forming the weak bondregions involves etching the surface of the weak bond regions 5. Duringthis etching step, pillars 9 are defined in the weak bond regions 5 onsurfaces 1A (FIG. 8), 2A (FIG. 9), or both 1A and 2A. The pillars may bedefined by selective etching, leaving the pillars behind. The shape ofthe pillars may be triangular, pyramid shaped, rectangular,hemispherical, or other suitable shape. Alternatively, the pillars maybe grown or deposited in the etched region. Another aforementionedtreatment technique involves inclusion of a void area 10 (FIGS. 12 and13), e.g., formed by etching, machining, or both (depending on thematerials used) at the weak bond regions 5 in layer 1 (FIG. 12), 2 (FIG.13). Accordingly, when the first layer 1 is bonded to the second layer2, the void areas 10 will minimize the bonding, as compared to thestrong bond regions 6, which will facilitate subsequent debonding. Forselective bonding purposes, both for the pillars and the void areas,since there is less bonding surface area for the material to bond, theoverall bond strength at the weak bond region 5 is much weaker then thebonding at the strong bond regions 6. For heat dissipation, thesepillars or void areas also define channels. Optionally, these channelsmay include heat conducting materiel deposited therein as describedabove.

Note that these features of FIGS. 65–67 cannot be effectively formedusing through connectors according to the teachings of theaforementioned IBM U.S. Pat. No. 6,355,501. As described above, theconductors may be formed by depositing suitable conducting material inoperable electrical or optical contact with the circuit portion. Inaddition, or alternatively, conductors may be formed inherently in theprocess of forming the selectively bonded device layer.

As described above, one of the treatment techniques for forming thestrong bond region involves use of one or more metal regions 8 at theweak bond regions 5 of surface 1A (FIG. 2) or both 1A and 2A. Forexample, metals including but not limited to Cu, Au, Pt, or anycombination or alloy thereof may be deposited on the weak bond regions5. Upon bonding of layers 1 and 2, the weak bond regions 5 will beweakly bonded. The strong bond regions may remain untreated (wherein thebond strength difference provides the requisite strong bond to weak bondratio with respect to weak bond layers 5 and strong bond regions 6), ormay be treated as described above or below to promote strong adhesion.

With the conducting layer preformed at the weakly bonded side of thedevice layer, it is ready for processing of the circuit portion. Incertain embodiments, the circuit portion may be formed to a depthsufficient to contact the preformed conducting layer. In certain otherembodiments, the preformed conducting layer may serve as at least aportion of the conductor for the subsequent level. It will beappreciated that the preformed conducting layer may be left as is, ormay be etched to form a desired conducting patter.

Alternatively, instead of forming a metal layer for weak bondingpurposes at the underside of the device layer, plural treatmenttechniques may be used to form the metal layer in the desired pattern ofthe conducting layer. Metal layers may be formed after one or more othertreatment techniques (e.g., roughening). Further, metal layers may beformed prior to one or more other treatment techniques.

In a further embodiment, a separate layer of the stack may be provideddevoted to interconnection. This layer operably allows for routing andbridging to avoid congestion while minimizing the need for overlaid(insulated) edge wires. For example, the horizontal (x direction)connection on FIG. 62 may be formed inside the layer if that layer was acongestion layer as described herein.

The various methods described herein are preferably carried out asdescribed on a wafer scale. However, it is contemplated that many of thefeatures are very useful even for vertically integrated chip fabricationon a chip scale.

Referring now to FIG. 69, a selectively bonded multiple layer substratehaving plural selectively bonded circuit forming regions (shown white)is depicted. Note that only a few representative circuit regions areshown for clarity, and that 100s or 1000s of circuit portions may beprovided on a single wafer. The remaining shaded portions of theselectively bonded multiple layer substrate is generally bonded bystrong bonds, as described above. FIG. 70 shows a side view of thisseries of selectively bonded circuit portions. These strong bond regionsgenerally resemble moats of strong bond regions to maintain thestructural integrity of the circuit or device portion during processingand/or peeling. To remove the selectively bonded circuit portions (e.g.,after circuit processing), each circuit portion may be removed asschematically shown in FIG. 71 and as described above with reference tothe debonding techniques. Note that the device layer may have a BOxlayer therein, as described above, at the WB or both WB and SB regions,to provide SOI chips.

The alignment of the several stacked layers may be accomplished by knownalignment techniques. For example, as described in the aforementionedIBM U.S. Pat. No. 6,355,501, optical alignment may be used, wherebyreference marks on adjacent layers (e.g., associated with transparentregions) are aligned with each other using known optical means. Thatreference also discloses a self aligned plug in method, wherebymechanical interconnection (e.g., as shown herein with reference toFIGS. 53–56) is used.

In another embodiment, and referring to FIG. 90, another mechanicalalignment method is provided for use in conjunction with the devicelayer wafer stacking. Mechanical protrusions or posts are provided onone layer, and receiving holes are provided on the other layer. Whenthey mechanically fit, alignment is achieved.

In another embodiment, alignment may be performed with the methoddisclosed in aforementioned U.S. Pat. No. 6,355,976. As shown therein, afixed reference is used at an alignment station, the layers are alignedwith comparison to a reference, UV curable adhesive applied, and thelayer is stacked on the previously stacked layers (or a substrate)maintain precise alignment based on the fixed reference, as compared toreferencing marks on previous layers, which induces cumulative errorbuild-up. UV light is applied as each layer is stacked.

A method and system for of aligning plural layers generally utilizes aprojected image of the layer to be aligned, wherein the projected imagemay be aligned with an alignment reference apart from the layer or stackof layers to be aligned, thereby eliminating inter-layer alignmentinduced error amplification described above.

The method includes placing a first layer on a mechanical substrate.Between the first layer and the mechanical substrate, in a preferredembodiment, a low viscosity adhesive materials is included. This lowviscosity adhesive material is preferably polymerizable (e.g., uponexposure to UV radiation), and optionally, this adhesive material may bedecomposable, wherein alternative adhesives may be used to permanentlybond a multitude of layers together after they have been formedaccording to the steps described herein.

The system further includes a polarizing reflector generally aligned ata 45-degree angle with respect to the first layer. A source of light isdirected towards the polarizing reflector and is directed toward thefirst layer. Additionally, a quarter wave phase retarder is placedbetween the polarizing reflector and the first layer. This quarter wavephase retarder is optional, so that polarized light reflected from thereflector may subsequently reflect from layer one and transmit throughthe polarizing reflector, since the polarization state is reversed bythe quarter wave phase retarder.

Layer one further includes one or more alignment markings. Thesealignment markings may be etched regions, materials applied to thelayer, shaped regions, or other known alignment markings. When polarizedor unpolarized light is transmitted toward the polarizing reflector,light reflects from these alignment markings, and, in certainembodiments, back through the quarter wave phase retarder andsubsequently through the polarizing reflector to project an image of thepositions of the alignment marks.

The image of the position of the alignment markings is compared with analignment reference. This alignment reference includes alignment marksthat correspond to the alignment marks on the first layer. If the firstlayer is properly aligned, as determined, for example, by a comparator,no further action is required. However, in the event that the layer isnot aligned, light will pass through the alignment reference can bedetected by a comparator or a detector, and an appropriate X-Y-thetasubsystem system will serve to reposition the first layer in the xdirection, the y direction, and/or the angular direction until thealignment markings in the alignment reference from the reflected lightreflected through the polarizing reflector are aligned. When thedetector detects a null value (i.e., the light from the first layer inalignment with the alignment markings on the alignment reference) thelayers are aligned.

Alternatively, the alignment markings may be such that polarized lightdoes not reflect, and a certain wavelength of polarized light is chosenthat does reflect from the remaining unmarked portions of the layer.Thus, a null value will be attained when light is reflected at allportions except at the position of the alignment mark on the alignmentreference.

In a preferred embodiment, the null detector or comparator is operablycoupled to the X-Y-theta subsystem, such that an automated alignmentprocess may be attained. That is, if the null detector detects light,the X-Y-theta subsystem will be adjusted until a null value is detected.In further alternative embodiment, instead of detecting a null valuewhen alignment is correct, light may be transmitted through, forexample, an aperture or transparent portion (with respect to the lightused) in the alignment reference corresponding to the alignment markingmay be provided, wherein light passes through only when alignment isproper.

The described process may be repeated for a second layer, a third layer,etc. through an Nth layer. One alternative projecting system mayincluding a scanning process, whereby the surface is scanned by a laserbeam which has been reflected by the reflected been may be processedthrough appropriate software or through another comparator to analignment reference. This may include use of known Fourier optics andother scanning and detection systems.

An important benefit of this system is that error due to error in theproceeding layer(s) is eliminating, since the alignment referenceremains constant or known throughout the alignment and stackingoperation. The N layers will all have been individually aligned with thealignment reference, thus the desired end product having a stack of Nlayers will be in proper alignment. With this method, extreme accuraciesmay be attained, since each individual layer is aligned with respect toa known or constant reference, as opposed to being aligned with respectto the preceding layer. Therefore, extreme accuracy may be attained,since, in the worst-case, alignment may be off due to a single error asopposed to an error multiplied for each of up to N layers.

When N layers have been stacked in aligned, they may be bonded togetherby the adhesives described above, and as mentioned, those adhesives mayalso be decomposed and substituted with another adhesive.

Referring to FIG. 72, an exemplary system and method is described. Themethod includes placing a first layer 150 including an alignment marking170 on a mechanical substrate 102. The alignment marking 170 maycomprise a dot, line, curve, shape, or other marking formed on or withinthe layer by depositing, etching, or the like. As described further, thealignment marking 170 generally reflects light of a certainpolarization.

The system further includes a polarizing reflector 104, generallyaligned at a 45-degree angle with respect to the first layer 150. Asource of light 106 is directed towards the polarizing reflector 104 andis polarized light 108 is directed toward the alignment marking 170 onthe first layer 150. Additionally, a quarter wave phase retarder 110 isplaced between the polarizing reflector 104 and the first layer 150.This quarter wave phase retarder 110 allows polarized light 108reflected from the reflector 104 may subsequently reflect back 112 fromalignment marking 170 and transmit through the polarizing reflector 104,as the polarization state is reversed by the quarter wave phase retarder110.

When polarized light 108 transmitted from the polarizing reflector 104having a first polarization state, polarized light with the same firstpolarization state reflects from these alignment markings through thequarter wave phase retarder 110, where the light is converted to asecond polarization state, enabling the light reflected from thealignment markings to be transmitted through the polarizing reflector104 to project an image 112 of the positions of the alignment marks.

The image 112 of the position of the alignment markings is compared withan alignment reference 114. This alignment reference 114 includesalignment marks that correspond to the alignment marks on the firstlayer. If the first layer is properly aligned, as determined, forexample, by a null value within a comparator or detected 116, no furtheraction is required. However, in the event that the layer is not aligned,light that passes through the alignment reference 114 can be detected bythe comparator or a detector 116, and mechanical alignment of the layer150 is required.

Referring to FIG. 73, a pair of alignment markings 270 may be providedto increase accuracy.

Referring to FIG. 74, a pair of light sources may be directed to thepolarizing reflector to decrease energy, each light source beingdirected to an area where the alignment marking is estimated to beaccounting for expected alignment error.

Referring to FIGS. 75 in conjunction with FIG. 76, X-Y-theta subsystems490 and 590 are provided, which are controllable coupled to the detectoror comparator. The X-Y-theta subsystem repositions the first layer inthe x direction, the y direction, and/or the angular direction until thealignment markings in the alignment reference from the reflected lightreflected through the polarizing reflector are aligned, as indicated bythe detector or comparator. In a preferred embodiment, the null detectoror comparator is operably coupled to the X-Y-theta subsystem, such thatan automated alignment process may be attained. That is, if the nulldetector detects light, the X-Y-theta subsystem will be adjusted until anull value is detected.

When a low viscosity, polymerizable adhesive is used to adhere the layer150 to the substrate (or a subsequent layer atop a preceding layer), theadhesive allows repositioning of the layer by the X-Y-theta subsystem.When alignment is attained, such adhesive material may then bepolymerized to “set” the aligned layer in position.

As shown in FIG. 75, X-Y-theta subsystems 490 includes a motion controlsystem coupled to the wafer or to appropriate handles, for example, atthe edges of the wafer. The motion control system may comprise one ormore vacuum handlers attached to the edges or a designated annular areaproximate the edge of the wafer layer, for example. Further, holes maybe formed in the wafer to allow for access via an arm from the motioncontrol system.

As shown in FIG. 76, a pair of X-Y-theta subsystems 590 are provided onopposite sides of the layer to be repositioned in response tonon-alignment detection by the detector or comparator.

In another embodiment, and referring now to FIG. 77, plural opticssystems (each of which is substantially similar to that of FIG. 72) areprovided to coincide with plural alignment marks for increased accuracy.

Referring now to FIG. 78, a device is shown that is suitable for one ormore alignment process functionalities. The device includes pluralsub-systems therein. In one embodiment, the sub-systems serve singlefunctionality, e.g., to write alignment marks or to detect alignmentmarks. For example, one device may includes plural sub-systems forwriting alignment marks, and another device may include pluralsub-systems for detecting alignment marks. To ensure alignment accuracy,such separate devices should be fabricated so that the writing positionand the detection reference positions are substantially identical, or atleast within the requisite device tolerance.

In one method of aligning using an alignment device, alignment marks maybe positioned on a device layer during processing of the circuitportions. Here, alignment marks may be included on one or more of themask(s) used for circuit portion processing, such that the alignmentmarks correspond to plural sub-systems for detecting alignment marks inthe alignment mark detection device.

In another method of using an alignment mark detection device and awriting device, the devices themselves are positioned in alignment.Further, the devices may be bonded together to ensure accuracy ofalignment. The sequence (i.e., relative the layers to be aligned) ininsignificant, so long as the device between the other device and thelayer to be aligned is transparent to the other device. For example, ifthe outermost device is the alignment mark detection device, then thewriting device should be optically transparent, for example, if opticalreference mark detection is used or if other scanning is used. If theoutermost device is the writing device, then the alignment device shouldbe transparent to the writing signal, for example, if alignment markwriting is effectuated by exposing the layer to have marks writtenthereon to certain wavelength of light. Alternatively, mark writing canbe at a known angle to allow bypass of the detection device.

In another embodiment, writing and alignment may be performed with thesame device. For example, on optical array as described above can beused to both expose the layer to a marking light signal, and tosubsequently detect the formed marks.

The alignment mark writing and/or writing and detection device, or anidentical copy thereof, may also be used to mark and/or etch alignmentmarks in the one or more masks used to form circuit portions on eachdevice layer. Conventionally, IC, MEMs, or other useful devices areformed of several different layers whereby the mask for each layer isaligned to previous mask. Here, the mask for the Nth layer is notaligned to the (N−1)th layer, but rather to a common writer/detector. Inanother embodiment, the writer/aligner may also be integrated into adevice having mask writing functionality.

In a further embodiment, a device layer may be provided with alignmentmarks, prior to circuit portion processing. The same or a substantiallyidentical alignment mark writing device, as described herein, or otherwriting devices, is used to mark the mask(s) and or exposure devices tobe used for forming at least a portion of the circuit, MEMs or otheruseful device region.

Accurate alignment of first the device layer, then the mask(s) and/orexposure devices, is readily possible using a reference alignment markdetector that is matched with the alignment writer, thereby providingwell defined patterns of useful devices on the device layer with matchedalignment marks. Alternatively, as described herein, an integralalignment mark writer/detector may be used to ensure alignment accuracy.

Note that the device itself may be formed using the herein describedmultiple layer substrates to form each layer (not shown), and aligning,stacking and bonding plural layers. The subsystems may include, but arenot limited to, polarizing based systems, lens systems, light funnel,STM tip system, electron beam through aperture, cameras, apertures withlight source, photodetector, apertures for electrons, ions and x-rays,and combinations comprising at least one of the foregoing.

In a further embodiment, the alignment marks that are written mayfurther include mapping lines or marks surrounding the center, forexample. This is particularly desirable when scanning techniques areused, for example, whereby the scanner/comparator may not only detectwhen there is or is not alignment, but mapping instructions may beprovided by detecting the known mapping marks. This, the systems andtime requirements to “focus” in on an alignment mark is significantlyreduced. For example, the comparator may determine that movement of theX-Y-theta subsystem(s) should position the layer −0.1 microns X and+0.05 microns Y, based on reading the mapping marks.

The above described novel alignment technique may result in aligning Nlayers with unprecedented nm accuracy. Such an alignment method,incorporated with the other multiple layer processing techniques andexemplary applications described herein, may substantially facilitate amultitude of 3-D micro and nano devices.

Referring now to FIG. 86, another alignment method is disclosed. Here, atapered hole (e.g., having approximately 45 degree taper) is provided atan alignment position (e.g., in lieu of an alignment mark) on the pluraldevice layers to be stacked. Such alignment holes may be formed prior toformation of the useful structures or after formation of the usefulstructures. When the layers are stacked, a light beam is attempted totransmit through the holes. When the layer is not aligned, the lightwill not pass through. The layer is then shifted until light reflectsfrom the Nth layer.

Alternatively, the tapered holes may be filled with opticallytransparent material, for example, such as SiOx. Further, while notpreferred as cumulative errors may occur, a layer may be aligned withthe adjacent layer.

Referring now to FIG. 87, an alignment method for wafer level stackingis provided. The mask may be provided with alignment functionality asdescribed above. However, perfect grid alignment may still not beattained. For example, the relative positions of circuit portions andassociated contacts are offset as shown by the dashed reference lines.This random skewing of the useful structure portions may be problematicfor wafer level stacking, since hundreds of useful devices may beprocessed on a wafer.

To resolve this potential problem, at the wafer level, globalinterconnects or metalization may be provided. Generally, as shown inFIG. 87, the global metalization comprise oversized metalization. Theseglobal metalization are formed using the same mask at each level. Thereare sufficiently large to compensate for any local die position offset.Further, the global metalization also serves to provide edgeinterconnection as described above. Note that the cut line is shown atthe end of the global metalization.

Referring now to FIG. 91, a further optical alignment technique isprovided. A first wafer and a second wafer are each provided with amatching pair of alignment windows, in the form of a pair of rectangles,for example, perpendicular one another. When the second wafer is movedover the first wafer, as shown, only a square is visible. Based on thispattern, movement is in the x direction until the second attempt patternis seen. Then, movement is in the y direction until the light matchesthe alignment holes.

Alternatively, the handler may include a resonant layer, thereby servingas a handler and an alignment device. The handler may comprise any knownhandler, including that described in aforementioned PCT patentapplication Ser. PCT/US/02/31348 filed on Oct. 2, 2002 and entitled“Device And Method For Handling Fragile Objects, And ManufacturingMethod Thereof”.

An embodiment of this hybrid handler/LC aligner is shown in FIG. 96,along with an alignment method using the handler. An LC circuit ispartially formed in the handler. Note the open circuit. The layerincludes a conductor matching the open circuit region, which serves asthe alignment mark. The layer including the matching alignment conductoris handled as is known in the handler art. The device layer is fed RFsignals from the open LC circuit in the handler. When the devices arenear alignment, RF excitation increases, and generally reaches a maximumat the aligned position, i.e., the LC circuit is completely closed.

This method is in contrast to the capacitance method described in IBMPat. No. 6,355,501, whereby identical resonant circuits are formed onadjacent layers. An AC signal is applied to the metal patterned resonantcircuits and aligned based on the magnitude of the sensed currentinduced by the resonant circuits, whereby perfect alignment isrepresented by maximum sensed current value. This method is invasive atthe layers to be aligned, potentially causing damage, whereas thehandler device bears the invasive transmission in the present embodimentusing the hybrid handler/LC aligner.

Referring to FIG. 97, various conductor patterns (and accordingly variedhybrid handler/LC aligner systems, not shown) may be provided forsub-micron or nano-scale alignment.

Bonding as described herein may be temporary or permanent. Temporarybonds may be formed, for example, as described above with reference toalignment—that is, after the layer is properly aligned, a temporary bondis formed at local regions of the layer. Note that this bond may remainafter final processing, or it may be decomposed as described herein.Further, this bonding step, generally occurring after alignment, may besufficient to serve as a “permanent” bond.

Generally, permanent bonding of the separate layers after alignment asdescribed herein may be accomplished by a variety of techniques and/orphysical phenomenon, including but not limited to, eutectic, fusion,anodic, vacuum, Van der Waals, chemical adhesion, hydrophobicphenomenon, hydrophilic phenomenon, hydrogen bonding, coulombic forces,capillary forces, very short-ranged forces, or a combination comprisingat least one of the foregoing bonding techniques and/or physicalphenomenon.

In one embodiment, radiation (heat, UV, X-ray, etc) curable adhesivesare used for simplicity of fabrication. The UV bonding may be carriedout as each layer is stacked, or as a single step.

In certain embodiments, when UV bonding is carried out as single step,the edge portions of the wafer, or of the chip if fabrication is on achip scale, are UV transparent, for horizontal UV access. To cure theadhesive via radiation from the top of the wafer, radiation transparentregions may be provided at various layers to expose the adhesive tosuitable radiation. In other embodiments, the layers are cured layer bylayer. In still other embodiments, adhesive may be applied from theedges.

Preferably, portions of the die include adhered sections, andaccordingly may include radiation transparent regions.

In another embodiment, to avoid glue exposure to the metalized areaswhere interconnects are to be formed, or to avoid glue exposure to thecircuit or other useful device portions, glue may be patterned on thesurface(s) to be adhered. In one embodiment, masking the areas to avoidand depositing adhesive there around may provide a patterned adhesive.Alternatively, controlled deposition may be used to selectively depositthe adhesive. Note that the tolerance for the adhesive may be greaterthan tolerances at other process steps.

To cure the adhesive, edge radiation transparent portions may beprovided, generally as described in aforementioned U.S. Pat. No.6,355,976. Alternatively, as described above, radiation transparentwindows may be provided in optical alignment with the patterned adhesiveregions.

The patterned adhesive is advantageously decomposable such that theadhesion may be temporary. Thus, after the entire stack is formed, thetemporary bonds may optionally be decomposed, and the stack permanentlybonded by other means, such as fusion.

After the stack is diced, the edges are metalized. The metalization maycomprise at least one layer/pattern. Plural metalization layers may beprovided, which are preferably insulated as is known in the art.

In one embodiment, MSA architecture may be included as described inaforementioned U.S. Pat. No. 6,355,976. Notably, encoding may beprovided, thereby permitting selection of individual circuits on thestack with minimum connections and with the shortest propagation delays.

A problem that others encounter, particularly with wafer scale stackingand integration, relates to useful device yield. Herein, this isovercome by suitable diagnostic operations after dicing and sorting,based, e.g., on the number of functioning layers. This method may allowyields approaching 100%.

The method includes: providing a plurality of vertically integrateddevices having unknown device health status (generally in the form of“blanks” ready for vending, but having interconnection wiring andsubstantially ready for, e.g., microprocessing, modular processing, bitsliced processors, parallel processors or storage applications);performing diagnostics on the vertically integrated devices; and sortingthe vertically integrated devices based on the number of known goodlayers.

The devices may be provided by one or more of the processes describedherein, or alternatively by other known methods of forming verticallyintegrated devices. The methods herein are preferred in certainembodiments for various reasons. The edge interconnects of the presentmethods allow for external diagnostic procedure. By stacking and dicingvertically integrated devices on a wafer level, economies of scale maybe taken advantage of. The present methods also facilitate redundancy ofconnection.

During diagnostics, known diagnostic methods may be used to determinehow many layers of a device are good. Based on the number of goodlayers, the vertically integrated devices are sorted or categorized intobins corresponding with a numerical range of good layers. Alternatively,or in combination, the vertically integrated devices may be sorted orcategorized based on device speed. The different bins thus representproduct that is suitable for different users.

For example, and referring to FIG. 92, assume the goal is to achieve1000 stacked layers on a wafer scale of a wafer producing 500 die. Binsare provided for those with 1000 known good layers; 500 known goodlayers; 250 known good layers; 100 known good layers; 50 known goodlayers; and 1 known good layer.

Further, assume that only 10% of the die meet the standards for the 1000stacked layers. These are sorted into “1000” bin. Obviously, these arethe most expensive die stacks, having the desired number of layers.Still further, assume that 10% of the die have greater than 900 but less1000 known good layers. These are sorted in the “500” bin. Of the 80%remaining, assume 40% are between 500 and 900 known good layers. Thesealso go in to the “500” bin. Note that, of course, the levels for eachbin may vary depending, for example, on the demands of the customers.Assume 20% have between 250 and 499 known good layers. These go to the“250” bin. Further, assume 10% have between 100 and 249 known goodlayers, 5% have between 50 and 99 known good dies and the remaining 5%have between 1 and 49 known good dies, which are sorted to the “100”bin, the “50” bin and the “1” bin, respectively.

Each of the bins being priced accordingly, and demand should exist foreach of the various die with a certain number of known good layers.Thus, the commercial yield may be extraordinarily high.

Still using the above example, assume that a customer specifies at least100 known good layers. Any of the die stacks in the “100” bin aresuitable. Alternatively, and referring to FIG. 93, a device with 259layers may be sliced horizontally to form one stack of 135 layers andanother stack of 124 layers. The cut may be generally in the x-y planeto reduce the z dimension of the stack. In a preferred embodiment, thecut is formed at one of the known bad die layers to minimize waste.

In another example, and referring to FIG. 94, assume a customerspecifies a device with 200 operable layers. A stack of 110 known gooddie and a stack of 95 known good die may be vertically stacked togetherin the z direction to form a device having 205 known good layers. Ofcourse, it is contemplated that more than two die stacks may be stacked.Accordingly, in manufacturing it is possible to take from one bin to fixa die that is lacking a full stack.

Referring to FIG. 95, it is also possible to edge stack the die stacks.This is operably provided herein with the plural edge connectors,generally as described above.

In a further embodiment, after diagnostics and prior to stacking, onelayer or a portion of one layer may serve to stores health or testresult information. Further, programming and addressing functionalitymay also be provided in the stacked die. Note that when these arestacked, two layers are used for the health or test result information,although it is contemplated that these may be reprogrammed with updatedhealth and status information. This method is advantageously useful whenthe layers are identical layers.

Various products and devices may be formed using the processes disclosedherein. As mentioned above, “blanks”, both as single layer andvertically integrated layers (complete with interconnections andoptional addressing and encoding functionality), generally of identicallayers. Another series of products and devices may be formed fromdifferent layers. These may be standard (e.g., MEMs or microfluidicswith integrated processors and/or memory), or alternatively may be “madeto order” based on needs. For example, GPS, RF, power cells, solarcells, and other useful devices may be integrated in the verticalstacks.

Vertically integrated microelectronics may contain a variety of usefulstructures or devices formed therein. For example, very high speedprocessing may be accomplished by stacking a multitude of processingcircuits according to the methods herein. Even more speed may be derivedif the MSA architecture is utilized.

In another embodiment, massive data storage (e.g., capable of 64 GB)devices may be formed according to the methods herein. Such devices mayoptionally incorporate vertically integrated memory with wired and/orwireless external connection, for communication and data transfer to andfrom PCs, TVs, PDAs, or other memory requiring devices.

In another embodiment, a vertically integrated device formed accordingto the methods herein may include one or more processors and/or memorydevices in conjunction with optical processing, communication orswitching functionality.

In another embodiment, a vertically integrated device formed accordingto the methods herein may include one or more processors and/or memorydevices in conjunction with RF transmission and/or receivingfunctionality.

In another embodiment, a vertically integrated device formed accordingto the methods herein may include one or more processors and/or memorydevices in conjunction with a global positioning system receiver and/ortransmitter.

In still further embodiments, a vertically integrated device formedaccording to the methods herein may include one or more processorsand/or memory devices in conjunction with optical processing,communication or switching functionality; RF transmission and/orreceiving functionality; and/or a global positioning system receiverand/or transmitter.

For example, one exemplary product may include a micro-jukebox,providing a user with 100+ hours of customized programming per week onmedia formed with the herein disclosed methods.

Other memory storage systems include optical, scan tollingmicroscopic/nano storage; and holographic storage.

Microfluidic devices may serve many purposes. Reductions in costs andincreases in quality and functionality may be derived with the presentmethods and systems. Microfluidics may be provided for various end uses,including but not limited to biotechnology, chemical analysis, scentproducing apparatus, micro and nano scale material deposition, heattransfer (e.g., as described herein).

As described in U.S. Pat. No. 6,355,976, and hereinabove, cooling layersmay be formed between device layers. Notably, these cooling layers arenot possible based on the teachings of IBM U.S. Pat. No. 6,355,501.

Microfluidic devices may also be formed by stacking channels, e.g., asdescribed in part in the context of a handler in aforementioned PCTpatent application Ser. PCT/US/02/31348 filed on Oct. 2, 2002 andentitled “Device And Method For Handling Fragile Objects, AndManufacturing Method Thereof”.

In addition to stacking of channels, other microfluidic devices may bereadily integrated, either by forming those devices according to knowntechniques, preferably on the weak bond regions of the device layer foreasy removal, or by sectional assembly, generally described below withrespect to MEMs. These devices may include, but are not limited to,micro flow sensors (e.g., gas flow sensors, surface shear sensors,liquid flow sensors, thermal dilution flow sensors, thermal transit-timesensors, and differential pressure flow sensors), microvalves withexternal actuators (e.g., solenoid plunger, piezoelectric actuators,pneumatic actuators, shape memory alloy actuators), microvalves withintegrated actuators (e.g., electrostatic actuators, bimetallicactuators, thermopneumatic actuators, electromagnetic actuators), checkvalves, mechanical micropumps (e.g., piezoelectric micropumps, pneumaticmicropumps, thermopneumatic micropumps, electrostatic micropumps),nonmechanical pumps (e.g., ultrasonically driven micropump,electro-osmosis micropump, electrohydrodynamic micropumps).

Using the processes described herein, an integrated device includingmicrofluidics as well as processor(s), memory, optical processing,communication or switching functionality; RF transmission and/orreceiving functionality; MEMs; and/or a global positioning systemreceiver and/or transmitter.

PCT application Ser. No. PCT/US02/26090 filed on Aug. 15, 2002 andentitled “Mems And Method Of Manufacturing Mems”, which is incorporatedby reference herein, discloses a method to form a vertically integratedstack including MEMs and other functionality. In general, the methodstherein for forming each MEMs device at the weak bond regions of thedevice layer (as described herein). Preferably, on a wafer scale, thedevice layer is removed with minimal damage to the MEMs devices, and thewafer is generally stacked, aligned and bonded with other MEMs, orlayers having other useful devices.

Referring now to FIG. 98, views of a cross section, a cantilever bearingedge, an electrical contact edge, and top views of plural layers formedin or on selectively bonded device regions of a multiple layer substrateare shown. In general, the FIG. represents a MEMs device that is formedby stacking cross sectional portions of the device. The bottom layer 1generally serves as a substrate. Layer 2 includes an edge extendingcontact. Layer 3 includes a portion of the edge extending contact and anopening, generally to avoid restriction of movement of the mechanicalcomponents of the MEMs device. Layer 4 includes an opening. Layer 5 is aportion of a mechanical component (e.g., a cantilever) that ispositioned within the stack for contact with the contact portion oflayer 3. Layer 6 is another potion of the mechanical component of layer5. Layer 7 is an opening to allow contact between the mechanical devicein layer 6 and that in layer 8. Layer 8 includes openings and anothermechanical component. Layer 9 shows an opening. Layer 10 shows themechanical component extending to the edge of the vertically integratedchip.

FIGS. 99 and 100 show enlarged sectional views of processing certainsteps in the MEMs device of FIG. 98. Note that each layer is generallyvery simple as a cross section, as opposed to micro-machining thedesired cantilevered structure. This remains true for any MEMs device,as they may readily be broken down in cross section based on physicaland mechanical characteristics.

Optionally, to support layers during stacking, a decomposable materialmay be provided in the areas to be voided and that require mechanicalsupport.

In further embodiments, logic circuits, memory, RF circuits, opticalcircuits, power devices, microfluidics, or any combination comprising atleast one of the foregoing useful devices may be integrated in the stack(generally depicted in FIG. 98 in cross section).

MEMs may include, but are not limited to, cantilevered structures (e.g.,as resonators or resonance detectors), micro-turbines, micro-gears,micro-turntables, optical switches, switchable mirrors (rigid andmembrane based), V-groove joints (e.g., for curling structures, bendingstructures, or for robotic arms and/or legs); microsensors that canmeasure one or more physical and non-physical variables includingacceleration, pressure, force, torque, flow, magnetic field,temperature, gas composition, humidity, acidity, fluid ionicconcentration and biological gas/liquid/molecular concentration;micro-actuators; micro-pistons; or any other MEMs device.

As mentioned, the MEMs devices may be broken down according to crosssection and fabricated from several layers according to the teachingsherein. However, it is understood that an entire MEMs device may befabricated on the device layer, and transferred and stacked to anotherdevice, or used as a stand-alone device.

Using the processes described herein, an integrated device includingMEMs as well as processor(s), memory, optical processing, communicationor switching functionality; RF transmission and/or receivingfunctionality; microfluidics; and/or a global positioning systemreceiver and/or transmitter.

Other devices that may be formed according to the methods describedherein include, but are not limited to, micro-jets (e.g., for use inmicro-satellites, robotic insects, biological probe devices, directedsmart “pills” (e.g., wherein a micro-jet coupled with suitable sensorsis capable of locating certain tissue, for example, and with built inmicrofluidics, and a payload of pharmaceuticals, may direct thepharmaceuticals to the affected tissue)). Further devices that may beformed according to the methods described herein include bit slicedprocessors, parallel processors, modular processors, micro engines withmicrofluidics, IC, memory, MEMS, or any combination thereof.

While preferred embodiments have been shown and described, variousmodifications and substitutions may be made thereto without departingfrom the spirit and scope of the invention. Accordingly, it is to beunderstood that the present invention has been described by way ofillustrations and not limitation.

1. A method of fabricating a vertical microelectromechanical device, themethod comprising the steps of: providing a bulk substrate; selectivelycreating strong bond regions and weak bond regions on said substrate;providing a first bonded semiconductor layer vertically supported onsaid substrate; creating an electrode on said first bonded semiconductorlayer, said electrodes corresponding to said weak bond regions; creatingan actuatable element disposed opposite said electrode; removing saidfirst semiconductor layer from said bulk substrate; and bonding saidfirst semiconductor layer to a second semiconductor layer.
 2. The methodof claim 1 further comprising the step of aligning said firstsemiconductor layer with said second semiconductor layer havingsimilarly positioned electrodes.
 3. The method of claim 2, wherein saidaligning step is mechanical.
 4. The method of claim 2, wherein saidaligning step is optical alignment.
 5. The method of claim 1 furthercomprising the step of creating an electrode on said secondsemiconductor layer.
 6. The method of claim 5, wherein said secondsemiconductor layer has semiconductor device portions on said weak bondregions.
 7. The method of claim 1, wherein the ratio of areas of saidstrong bond regions to said weak bond regions is greater than
 1. 8. Themethod of claim 1, wherein the ratio of bond strengths of said strongbond regions to said weak bond regions is greater than
 1. 9. The methodof claim 1 further comprising the step of interconnecting said firstsemiconductor layer with said second semiconductor layer.
 10. The methodof claim 9, wherein said step of interconnecting is implemented at theedge of said semiconductor layers.
 11. The method of claim 10, whereinsaid step of interconnecting is electrically coupling.
 12. The method ofclaim 10, wherein said step of interconnecting is optically coupling.13. The method of claim 9, wherein said step of interconnecting isperformed vertically through said semiconductor layers.
 14. The methodof claim 5, further comprising the steps of: removing said secondsemiconductor layer from said bulk substrate; and bonding said secondsemiconductor layer to said first semiconductor layer.
 15. The method ofclaim 1, further comprising the steps of: providing an Nth semiconductorlayer vertically supported on said bulk substrate, said Nthsemiconductor layer having strong bond regions and weak bond regions;creating an electrode on said Nth semiconductor layer, said electrodecorresponding to said weak bond regions; removing said Nth semiconductorlayer from said bulk substrate; and bonding said Nth semiconductor layerto an (N−1)th semiconductor layer.
 16. The method of claim 15, whereinMEMs devices an formed from any two of said N semiconductor layers. 17.The method of claim 1, further comprising the step of: dicing saidbonded semi conductor layers to form one or more dies.
 18. The method ofclaim 17, further comprising the step of: interconnecting said bondedsemiconductor layers after said dicing step.
 19. The method of claim 18,further comprising the step of: forming edge connectors on the boundaryof said one or more dies.
 20. The method of claim 19 wherein said edgeconnectors serve as diagnostic conductors to determine health ofindividual die layers.
 21. The method of claim 1, wherein said bulksubstrate includes a buried oxide layer.
 22. The method of claim 21,wherein said buried oxide layer is formed by ion implantation.
 23. Amethod of fabricating a multi layer microfluidic device, the methodcomprising the steps of: providing a bulk substrate; selectivelycreating strong bond regions and weak bond regions on said substrate;providing a first bonded layer vertically supported on said substrate;creating a port on said first bonded layer, said port corresponding tosaid weak bond regions; creating a channel mechanically coupled to saidport; removing said first layer from said bulk substrate; and bondingsaid first bonded layer to a second layer.
 24. The method of claim 23further comprising the step of aligning said first layer with saidsecond layer having similarly positioned ports.
 25. The method of claim24, wherein said aligning step is mechanical alignment.
 26. The methodof claim 24, wherein said aligning step is optical alignment.
 27. Themethod of claim 23 further comprising the step of creating a port onsaid second layer.
 28. The method of claim 27, wherein said second layerhas microfluidic device portions on said weak bond regions.
 29. Themethod of claim 23, wherein the ratio of areas of said strong bondregions to said weak bond regions is greater than
 1. 30. The method ofclaim 23, wherein the ratio of bond strengths of said strong bondregions to said weak bond regions is greater than
 1. 31. The method ofclaim 23 further comprising the step of interconnecting said first layerwith said second layer.
 32. The method of claim 31, wherein said step ofinterconnecting is implemented at the edge of said first and said secondlayers.
 33. The method of claim 32, wherein said step of interconnectingis performed vertically through said first and said second layers. 34.The method of claim 31, further comprising the steps of: removing saidsecond layer from said bulk substrate; and bonding said second layer tosaid first layer.
 35. The method of claim 23, further comprising thesteps of: providing an Nth layer vertically supported on said bulksubstrate, said Nth layer having strong bond regions and weak bondregions; creating a port on said Nth layer, said port corresponding tosaid weak bond regions; removing said Nth layer from said bulksubstrate; and bonding said Nth layer to an (N−1)th layer.
 36. Themethod of claim 35, wherein microfluidic devices are formed from any twoof said N layers.
 37. The method of claim 23, further comprising thestep of: dicing said bonded layers to form one or more dies.
 38. Themethod of claim 37, further comprising the step of: interconnecting saidbonded layers after said dicing step.
 39. The method of claim 38,further comprising the step of: forming edge connectors on the boundaryof said one or more dies.
 40. The method of claim 39 wherein said edgeconnectors serve as diagnostic indicators for determining the health ofindividual die layers.
 41. The method of claim 23, wherein said bulksubstrate includes a buried oxide layer.
 42. The method of claim 41,wherein said buried oxide layer is formed by ion implantation.